“…The most common materials as sensing materials for impedimetric ozone gas sensors are zinc oxide, indium oxide, tungsten trioxide, and carbon nanotubes. For the sensing layer morphology, different nanostructures are utilised-such as nanocolumns [43], nanorods [26,45], platelets [46,48], nanothin films [44,59,64,[68][69][70], nanoparticles [51,54,58,60,66], nanoislands [52], nanosheets [61], nanotubes [62,63], nanowires [66], and thick films [53]. As substrate, silicon dioxide/silicon, aluminium oxide, glass, aluminium, and quartz and for electrodes platinum, gold, titanium, and copper are commonly employed.…”