2000
DOI: 10.1109/55.887479
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Roughness-enhanced electroluminescence from metal oxide silicon tunneling diodes

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Cited by 34 publications
(29 citation statements)
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“…It has been argued that the luminescence efficiency could be enhanced with respect to that for bulk silicon because the accumulation of a high hole concentration confined to the interface and also due to symmetry breaking by the stress that exists at the Si/SiO 2 interface; both factors can contribute to an enhanced band gap luminescence. It has also been suggested that interface scattering, which can be controlled by interface roughness, can yield orders of magnitude enhancement [21]. As we will see, we observe this luminescence to a varying degree in all the MOS structures we address here with the different oxides and thermal treatments.…”
Section: Resultssupporting
confidence: 65%
“…It has been argued that the luminescence efficiency could be enhanced with respect to that for bulk silicon because the accumulation of a high hole concentration confined to the interface and also due to symmetry breaking by the stress that exists at the Si/SiO 2 interface; both factors can contribute to an enhanced band gap luminescence. It has also been suggested that interface scattering, which can be controlled by interface roughness, can yield orders of magnitude enhancement [21]. As we will see, we observe this luminescence to a varying degree in all the MOS structures we address here with the different oxides and thermal treatments.…”
Section: Resultssupporting
confidence: 65%
“…Structures with a higher surface roughness yielded more efficient BB luminescence [12]. An approximate two-order increase in magnitude in electroluminescence was reported for MOS tunnelling diodes for oxide with rough interface (grown at 900°C) than those with smoother one (grown at 1000°C).…”
Section: Introductionmentioning
confidence: 84%
“…As we already mentioned above the surface roughness can strongly influence the efficiency of the luminescence [12]. Indeed, in case of high surface recombination, a strong field in the semiconductor is necessary for an efficient barrier, driving the minority carriers into the bulk.…”
Section: Figurementioning
confidence: 99%
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“…As early as 1968, electroluminescence (EL) of a metal insulator semiconductor (MIS) diode at 77 K was demonstrated using the tunneling effect [9]. Recently, electroluminescence from the silicon band edge has been reported from electron-hole plasmas in the accumulation region of a MOS tunneling diode [10]. More recently, we have demonstrated that high-quality b-FeSi 2 precipitates can be formed by low-energy (<100 keV) iron implantation at low temperature ($À120°C), followed by rapid thermal annealing [11].…”
Section: Introductionmentioning
confidence: 99%