Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry

Abstract

Rotating compensator spectroscopic ellipsometry was used to study the optical properties of a rubbed polyimide layer. Two operating modes in the transmission configuration were studied. One was a conventional mode of `polarizer–sample–rotating compensator–analyzer'. The other was a dual rotation mode of `polarizer–rotating sample–rotating compensator–analyzer'. We found that calibration is not possible in the conventional mode due to the extremely small retardance and non-dichroic nature of the sample. Meanwhile, in dual rotation mode which we developed, a retardance smaller than 0.5° could be measured without calibration. Using this technique, the variation in retardance with rubbing could be easily determined over a range of 320–800 nm. The optical axis could also be determined with high precision for this sample, and this optical axis was found to be parallel to the direction of rubbing.

Difference–Sum Generalized Ellipsometry Method for Thin Films with Small Optical Anisotropy

“…Some thin films have optical anisotropy, and as a method of measuring the properties of these, standard ellipsometry or generalized ellipsometry (GE) has been mainly used. Thus far, III-V compounds 1) for semiconductor devices, liquid crystal molecules 2,3) and alignment layer films 4,5) for liquid crystal displays (LCDs), and magnetooptic materials 6) for storage devices have been measured. Regarding the advantages of nondestructive and noncontact measurement, these methods are useful for measuring thin films with optical anisotropy for electric devices.…”