Rutherford backscattering spectrometry: reminiscences and progresses

Chu, W. K.; Liu, J.R.

doi:10.1016/s0254-0584(97)80012-0

Cited by 16 publications

(9 citation statements)

References 47 publications

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“…Depth-proling measurements in the vicinity of the surface can be realized by means of different techniques like for example time-of-ight secondary ion mass spectroscopy (TOF-SIMS), 12 Rutherford backscattering (RBS), 13 medium energy ion scattering (MEIS), 14 elastic recoil detection analysis 15 or total reection X-ray uorescence (TXRF) combined with sputtering. 16 Each of the mentioned methods has its merits and inherent limitations in terms of sample consumption, cost of analysis, quantication, chemical and elemental sensitivity, lateral and depth resolution, and accessible depth region.…”

Section: Introductionmentioning

confidence: 99%

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Kayser

Hönicke

Banaś

et al. 2015

J. Anal. At. Spectrom.

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Depth-profiling measurements by means of synchrotron radiation based grazing XRF techniques, i.e., grazing emission X-ray fluorescence (GEXRF) and grazing incidence X-ray fluorescence (GIXRF), present a promising approach for the non-destructive, sub-nanometer scale precision characterization of ultra shallow ion-implantations. The nanometer resolution is of importance with respect to actual semiconductor applications where the down-scaling of the device dimensions requires the doping of shallower depth ranges. The depth distributions of implanted ions can be deduced from the intensity dependence of the detected X-ray fluorescence (XRF) signal from the dopant atoms on either the grazing emission angle of the emitted X-rays (GEXRF), or the grazing incidence angle of the incident Xrays (GIXRF). The investigated sample depth depends on the grazing angle and can be varied from a few to several hundred nanometers. The GEXRF setup was equipped with a focusing polycapillary half-lens to allow for laterally resolved studies. The dopant depth distribution of the investigated low-energy (energy range from 1 keV up to 8 keV) P, In and Sb ion-implantations in Si or Ge wafers were reconstructed from the GEXRF data by using two different approaches, one with and one without a priori knowledge about the bell-shaped dopant depth distribution function. The results were compared to simulations and the trends predicted by theory were found to be well reproduced. The experimental GEXRF findings were moreover verified for selected samples by GIXRF.

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Section: Introductionmentioning

confidence: 99%

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Kayser

Hönicke

Banaś

et al. 2015

J. Anal. At. Spectrom.

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“…Synthesis conditions (RBS) at the Department of Physics of ETH Zurich. This technique provides absolute elemental concentrations and is particularly appropriated for quantifying heavy elements in a light matrix, as is the case of Br in silicate glasses (Feldman and Mayer, 1986;Chu and Liu, 1996). A 3.5 mm diameter disk of Hpg-Br2 glass, mounted in epoxy and carboncoated, was exposed to a 2 MeV 4 He ion beam.…”

Section: Samplementioning

confidence: 99%

Bromine speciation and partitioning in slab-derived aqueous fluids and silicate melts and implications for halogen transfer in subduction zones

Louvel

Sanchez-Valle²,

Malfait

et al. 2020

Solid Earth

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Abstract. Understanding the behavior of halogens (Cl, Br, and I) in subduction zones is critical to constrain the geochemical cycle of these volatiles and associated trace metals, as well as to quantify the halogen fluxes to the atmosphere via volcanic degassing. Here, the partitioning of bromine between coexisting aqueous fluids and hydrous granitic melts and its speciation in slab-derived fluids have been investigated in situ up to 840 ∘C and 2.2 GPa by synchrotron x-ray fluorescence (SXRF) and x-ray absorption spectroscopy (XAS) in diamond anvil cells. The partition coefficients DBrf/m range from ∼2 to ∼15, with an average value of 6.7±3.6 (1σ) over the whole pressure–temperature (P–T) range, indicating a moderate Br enrichment in aqueous fluids, in agreement with previous work. Extended x-ray-absorption fine-structure (EXAFS) analysis further evidences a gradual evolution of Br speciation from hydrated Br ions [Br(H2O)6]− in slab dehydration fluids to more complex structures involving both Na ions and water molecules, [BrNax(H2O)y], in hydrous silicate melts and supercritical fluids released at greater depth (> 200 km). In denser fluids (ρ > 1.5 g cm−3) containing 60 wt % dissolved alkali–silicates and in hydrous Na2Si2O5 melts (10 wt % H2O), Br is found to be in a “salt-like” structure involving the six nearest Na ions and several next-nearest O neighbors that are either from water molecules and/or the silicate network. Bromine (and likely chlorine and iodine) complexing with alkalis is thus an efficient mechanism for the mobilization and transport of halogens by hydrous silicate melts and silica-rich supercritical fluids. Our results suggest that both shallow dehydration fluids and deeper silicate-bearing fluids efficiently remove halogens from the slab in the sub-arc region, thus favoring an efficient transfer of halogens across subduction zones.

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“…To overcome these limitations, the concentration of Br in Hpg-Br2 glass sample was determined by Rutherford Backscattering Spectroscopy (RBS). This technique provides absolute elemental concentrations and is particularly appropriated for the quantification of heavy elements in a light matrix as it is the case of Br in silicate glasses (Feldman and Mayer, 1986;Chu and Liu, 1996). The RBS analysis yielded a Br concentration of 0.96 ± 0.04 wt% ( Fig.…”

Section: Synthesis and Characterization Of Starting Materialsmentioning

confidence: 99%

Bromine speciation and partitioning in slab-derived fluids and melts: Implications for halogens recycling in subduction zones

Louvel

Sanchez-Valle

Malfait

et al. 2020

Preprint

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Abstract. Understanding the behavior of halogens (Cl, Br, and I) in subduction zones is critical to constrain the recycling of trace elements and metals, and to quantify the halogen fluxes to the atmosphere via volcanic degassing. Here, the partitioning of bromine between coexisting aqueous fluids and hydrous granitic melts and its speciation in slab-derived fluids have been investigated in situ up to 840 °C and 2.2 GPa by X-ray fluorescence (SXRF) and absorption (XANES and EXAFS) spectroscopy in hydrothermal diamond-anvil cells. The partition coefficients Df/mBr range from 15.3 ± 1.0 to 2.0 ± 0.1, indicating the preferential uptake of Br by aqueous fluids at all investigated conditions. EXAFS analysis further evidences a gradual evolution of Br speciation from hydrated Br ions [Br(H2O)6]− in slab dehydration fluids to more complex structures invoving both Na ions and water molecules, [BrNax(H2O)y], in hydrous silicate melts and supercritical fluids released at greather depth (> 200 km). In dense fluids containing 60 wt % dissolved alkali-silicates and in hydrous Na2Si2O5 melts (10 wt % H2O), Br is found in a salt-like structure involving 6 nearest Na ions and several next-nearest O neighbors that are either from water molecules or the tetrahedral silicate network. Bromine (and likely chlorine and iodine) complexation with alkalis is thus an efficient mechanism for the mobilization and transport of halogens by hydrous silicate melts and supercritical fluids, which can carry high amounts of Br, up to the 1000 ppm level. Overall, our results suggest that both shallow dehydration fluids and deeper silicate-bearing fluids efficiently remove halogens from the slab in the sub-arc region, thus controling an efficient recycling of halogens in subduction zones.

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Rutherford backscattering spectrometry: reminiscences and progresses

Cited by 16 publications

References 47 publications

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Bromine speciation and partitioning in slab-derived aqueous fluids and silicate melts and implications for halogen transfer in subduction zones

Bromine speciation and partitioning in slab-derived fluids and melts: Implications for halogens recycling in subduction zones

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