Wide range binary
and ternary thin film combinatorial libraries
mixing Al, Cu, and Ga were screened for identifying alloys with enhanced
ability to withstand electromigration. Bidimensional test wires were
obtained by lithographically patterning the substrates before simultaneous
vacuum co-deposition from independent sources. Current–voltage
measurement automation allowed for high throughput experimentation,
revealing the maximum current density and voltage at the electrical
failure threshold for each alloy. The grain boundary dynamic during
electromigration is attributed to the resultant between the force
corresponding to the electron flux density and the one corresponding
to the atomic concentration gradient perpendicular to the current
flow direction. The screening identifies Al-8 at. % Ga and Cu-5 at.
% Ga for replacing pure Al or Cu connecting lines in high current/power
electronics. Both alloys were deposited on polyethylene naphthalate
(PEN) flexible substrates. The film adhesion to PEN is enhanced by
alloying Al or Cu with Ga. Electrical testing demonstrated that Al-8
at. % Ga is more suitable for conducting lines in flexible electronics,
showing an almost 50% increase in electromigration suppression when
compared to pure Al. Moreover, Cu-5 at. % Ga showed superior properties
as compared to pure Cu on both SiO
2
and PEN substrates,
where more than 100% increase in maximum current density was identified.