2020
DOI: 10.1364/ao.393353
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Sapphire Fabry–Perot interferometer for high-temperature pressure sensing

Abstract: An adhesive-free encapsulation sapphire Fabry–Perot interferometer (FPI) is proposed and demonstrated for high-temperature pressure measurements. The sapphire FPI sensor is packaged by zirconia ferrules and a zirconia sleeve, which is easy to be configured and low in cost. Owing to this packaging technology, the sapphire FPI sensor presents good stability and high temperature resistance. The pressure and temperature properties of the sapphire FPI sensor are investigated within a temperature range from … Show more

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Cited by 29 publications
(12 citation statements)
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“…Sapphire has a high melting temperature up to 2050 °C and a wide transmission spectral range. The development of sapphire-based fiber-optic FP pressure sensors has been a long-term concern of researchers [ 50 , 51 , 52 , 53 , 54 , 55 ]. Figure 4 illustrates the recent progress of sapphire diaphragm-based fiber-optic FP sensors.…”
Section: Different Materials Of Mems Fp Pressure Sensor Diaphragmsmentioning
confidence: 99%
“…Sapphire has a high melting temperature up to 2050 °C and a wide transmission spectral range. The development of sapphire-based fiber-optic FP pressure sensors has been a long-term concern of researchers [ 50 , 51 , 52 , 53 , 54 , 55 ]. Figure 4 illustrates the recent progress of sapphire diaphragm-based fiber-optic FP sensors.…”
Section: Different Materials Of Mems Fp Pressure Sensor Diaphragmsmentioning
confidence: 99%
“…Equations ( 1) and ( 2) indicate that the reflection spectrum of the EFPI is a cosine function related to the cavity length which can be demodulated real time by the peak to peak method mentioned above. The cavity length L is determined by the center deflection of the diaphragm ω, which can be expressed as [14]:…”
Section: Operation Principlementioning
confidence: 99%
“…However, this type of pressure sensor can only work over a narrow range of pressure and the polymer diaphragm is easy to fall off in ultra-low temperature environment. Another type of diaphragm is fabricated by sapphire wafer [13,14]. However, the production process is complex and time-consuming, and the signal quality is relatively poor.…”
Section: Introductionmentioning
confidence: 99%
“…Another type of pressure sensor is based on cavity-length change, where the membrane with large size and small thickness is usually used as the reflective surface of the FP interferometer (FPI) for achieving a higher sensitivity. Membranes of different materials, such as silica [8,9], sapphire [10], diamond [11], silver [12], graphene [13,14] and polymer [15], have been used in building this FPI pressure sensors. Sensors made with silica and sapphire membranes have low sensitivities, however, they can be applied in a high temperature environment above 1000 • C [10].…”
Section: Introductionmentioning
confidence: 99%
“…Membranes of different materials, such as silica [8,9], sapphire [10], diamond [11], silver [12], graphene [13,14] and polymer [15], have been used in building this FPI pressure sensors. Sensors made with silica and sapphire membranes have low sensitivities, however, they can be applied in a high temperature environment above 1000 • C [10]. The sensor with diamond diaphragm can withstand high pressure up to 6.8 MPa [11].…”
Section: Introductionmentioning
confidence: 99%