SAW device analysis using a combination of FEM/BEM calculations and scanning interferometer measurements

Chamaly, S.; Lardat, R.; Pastureaud, T.; Dufilie, Pierre; Steichen, W.; Holmgren, O.; Kuitunen, M.; Knuuttila, J.V.; Salomaa, M.M.

doi:10.1109/ultsym.2003.1293409

Cited by 4 publications

(4 citation statements)

References 8 publications

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“…[22][23][24][25] The actuation of the droplet strongly depends on the surface vibration, therefore, in order to investigate the vibration characteristics of the SH-SAW on the 36° Y-X LiTaO3 surface, an FEM/BEM analysis was conducted to simulate the surface vibration of the SH-SAW device. The aforementioned structural parameters were adopted in the simulation in the absence of droplet and CYTOP thin layer.…”

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confidence: 99%

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Vertical jetting induced by shear horizontal leaky surface acoustic wave on 36° Y-X LiTaO3

Quan

Luo

et al. 2017

Applied Physics Letters

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Shear horizontal surface acoustic waves (SH-SAWs) have been regarded as good candidates for liquid sensing applications but are inefficient in fluid manipulation due to a minimal fluid coupling between the fluid and acoustic waves. However, in this letter, a vertical jetting function was realized using the SH-SAW generated from a 36° Y-X LiTaO3 SAW device. The jetting of the droplet induced by the SH-SAWs was observed nearly along the vertical direction, and the aspect ratio of the liquid beam is proportional to the applied power before breaking up, which is dramatically different from those generated from the conventional Rayleigh SAWs. By conducting theoretical simulation and experimental investigation on the SH-SAWs systematically, we concluded that the wave/energy pressure dissipated into the sessile droplets causes this vertical ejection on the device surface.

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confidence: 99%

“…The pressure gradient generated by the Rayleigh wave energy dissipation inside the droplet clearly follows the Rayleigh angle, which has been well-documented. 18,24 9…”

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confidence: 99%

Vertical jetting induced by shear horizontal leaky surface acoustic wave on 36° Y-X LiTaO3

Quan

Luo

et al. 2017

Applied Physics Letters

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“…It has been confirmed that a combined FEM/BEM provides an accurate simulation for the SAW devices [11][12][13]. The main advantage of the FEM/BEM is that it only needs the basic material constants and structure parameters, whereas other modeling methods, such as the couple of modes model, are based on parameters that are always hard to determine.…”

Section: Optimal Design Consideration and Simulationmentioning

confidence: 94%

A novel shock and heat tolerant gyrosensor utilizing a one-port surface acoustic wave reflective delay line

Yang

et al. 2012

J. Micromech. Microeng.

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A surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was fabricated on a 128 • YX LiNbO 3 piezoelectric substrate. The fabricated gyroscope is composed of a SAW resonator, metallic dots and a SAW reflective delay line. The SAW resonator, which is activated by a voltage-controlled oscillator, generates a stable standing wave with a large amplitude at an 80 MHz resonant frequency, and the metallic dots induce a Coriolis force and generate a secondary SAW in the direction orthogonal to the propagating standing wave. The SAW reflective delay line is employed to measure the Coriolis effect by analyzing the deviations in the resonant frequency of the SAW reflective delay line. A combined finite element method/boundary element method was utilized to extract the optimal device parameters prior to fabrication. The device was fabricated according to the modeling results and then measured on a rate table. When the device was subjected to an angular rotation, a secondary SAW from the vibrating metallic dots was generated owing to the Coriolis force, resulting in a perturbation of the propagating SAW in the SAW reflective delay line. Depending on the angular velocity, the reflection peak of SAW reflective delay line was changed linearly, and this change was measured by the network analyzer. The measured results matched the modeling results well. The obtained sensitivity was approximately 1.23 deg/(deg/s) in an angular rate range of 0-2000 deg s −1 . Good thermal and shock stabilities were observed during the evaluation process proving the shock and heat robustness of the fabricated SAW gyroscope.

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“…Another approach is to reduce the temperature in order to minimize the stress induced material transport (acoustomigration) in the SAW device. Yet another approach is to optimize the acoustic structure in order to improve power durability by reducing the amount of stress in the electrodes [20]. The important outcome to consider is above approaches represent complementary tradeoffs in achieving optimal performance and the power handling requirements become more prominent with the increasing frequency.…”

Section: Saw Device Simulationmentioning

confidence: 99%

A radio frequency controlled microvalve for biomedical applications

et al. 2006

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In this paper we propose the use of a RF controlled microvalve for implementation on a PZT substrate for biomedical applications. Such device has a huge range of applications such as parallel mixing of photo-lithographically defined nanolitre volumes, flow control in pneumatically driven microfluidic systems and lab-on-chip applications. The microvalve makes use of direct actuation mechanisms at the microscale level to allow its use in vivo applications. A number of acoustic propagation modes are investigated and their suitability for biomedical applications, in terms of the required displacement, device size and operation frequency. A theoretical model of the Surface Acoustic Wave (SAW) device is presented and its use in micro-valve application was evaluated using ANSYS tools. Furthermore, the wireless aspect of the device is considered through combining the RF antenna with the microvalve simulation by assuming a high carrier frequency with a small peak-to-peak signal. A new microvalve structure which uses a parallel type piezoelectric bimorph actuator was designed and simulated using ANSYS tools. Then, further optimization of the device was carried out to achieve a better coupling between electrical signal and mechanical actuation within the SAW device.

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SAW device analysis using a combination of FEM/BEM calculations and scanning interferometer measurements

Cited by 4 publications

References 8 publications

Vertical jetting induced by shear horizontal leaky surface acoustic wave on 36° Y-X LiTaO3

Vertical jetting induced by shear horizontal leaky surface acoustic wave on 36° Y-X LiTaO3

A novel shock and heat tolerant gyrosensor utilizing a one-port surface acoustic wave reflective delay line

A radio frequency controlled microvalve for biomedical applications

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