Scalability and interoperability in service-centric architectures for the Web

Schimkat, Ralf-Dieter; Nusser, G.; Buhler, D.

doi:10.1109/dexa.2000.875004

Cited by 2 publications

(1 citation statement)

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“…However, as operational conditions become more severe in mechanical force or electrical power handling, Au contact degradation increases, drastically shortening the MEMS switch lifetime. One approach toward increasing MEMS switch robustness is to investigate alternative contact materials, and a few have been investigated [4][5][6][7]. However, there are some serious impediments to the broad investigation of alternative contact materials.…”

Section: Introductionmentioning

confidence: 99%

A new test facility for efficient evaluation of MEMS contact materials

Yang

Lichtenwalner

Morris³

et al. 2007

J. Micromech. Microeng.

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A novel test facility for the efficient evaluation of microelectromechanical system (MEMS) switches and the development of alternative contact materials is described. The facility utilizes the upper cantilever from commercial MEMS contact switches, and tests these against alternative bottom contact materials within a modified atomic force microscope (AFM). The test closely approximates the real switch, but can accommodate a wider range of test conditions and contact materials. The facility allows alternative contact materials to be easily and quickly incorporated, and therefore evaluated by measuring the number of cycles to failure. The evolution of the wear surfaces of the switch contact materials under test can also be easily examined. In order to demonstrate the facility, the evolution of the contact resistance and wear of a commercial RF MEMS cantilever with Au contacts was monitored under accelerated test conditions, comparing the behavior of Au bottom contacts to an alternative Au-Ni alloy contact material. The Au-Ni (20 at.%) alloy displayed reduced wear rates and improved switch cycle lifetimes compared to pure Au, while retaining acceptable values of contact resistance.

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Section: Introductionmentioning

confidence: 99%