Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows

Piracha, Afaq Habib; Rath, Patrik; Ganesan, Kumaravelu; Kühn, Stefan; Pernice, Wolfram H. P.; Prawer, S.

doi:10.1021/acs.nanolett.6b00974

Cited by 52 publications

(40 citation statements)

References 58 publications

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“…Due to its high refractive index (2.39), it allows for the fabrication of sub-micron optical waveguides in integrated photonic chips. Many instances of photonic integrated circuits have been demonstrated using bonded and thinned single crystal diamond layers [2][3][4]. While the optical quality of the diamond thin films used in this approach is very good, the required bond and layer transfer processes add additional layers of complexity to the fabrication process.…”

Section: Introductionmentioning

confidence: 99%

Air-clad suspended nanocrystalline diamond ridge waveguides

Abdou¹,

Panduranga²,

Richter³

et al. 2018

Opt. Express

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A hybrid group IV ridge waveguide platform is demonstrated, with potential application across the optical spectrum from ultraviolet to the far infrared wavelengths. The waveguides are fabricated by partial etching of sub-micron ridges in a nanocrystalline diamond thin film grown on top of a silicon wafer. To create vertical confinement, the diamond film is locally undercut by exposing the chip to an isotropic fluorine plasma etch via etch holes surrounding the waveguides, resulting in a mechanically stable suspended air-clad waveguide platform. Optical characterization of the waveguides at 1550 nm yields an average optical loss of 4.67 ± 0.47 dB/mm. Further improvement to the fabrication process is expected to significantly reduce this waveguide loss.

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Section: Introductionmentioning

confidence: 99%

Air-clad suspended nanocrystalline diamond ridge waveguides

Abdou¹,

Panduranga²,

Richter³

et al. 2018

Opt. Express

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“…Recent progress in ion-slicing and homo-epitaxial growth techniques have shown potential for producing uniform large-area SCD membrane windows [32,33]. IR devices have been fabricated on these substrates, but they are still modest in performance with an IR grating coupling efficiency of about 3% [33]. This suggests that the membrane windows are not yet a viable platform for short-wave NIR and VIS-UV devices.…”

Section: Introductionmentioning

confidence: 99%

Down-scaling grating couplers and waveguides in single-crystal diamond for VIS-UV operation

et al. 2018

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We report on the design, fabrication and experimental demonstration of single-crystal diamond (SCD) waveguide devices with integrated grating couplers optimized for 850 nm, 635 nm, and 405 nm wavelengths, respectively. The devices are fabricated on SCD thin films using electron-beam lithography and reactive-ion etching technologies. To reduce the wafer wedge typically present in commercial diamond plates, we introduce a novel tilted-etching technique in the preparation of the thin films. We obtain 60% reduction of the wafer wedge, namely from 300 to 120 nm mm -1 , enabling us to properly fabricate the devices designed for the short to ultra-short wavelengths considered here. Using light in-and out-coupling with 50 μm core tapered fibers, we measure total (input plus output) grating coupling losses of 20.6 dB and 22.7 dB, and waveguide losses of 11 dB mm -1 and 20.5 dB mm -1 for the 850 nm and 635 nm wavelength devices, respectively. The 405 nm wavelength devices, tested with a lensed 9 μm core input fiber and with the same tapered output fiber as employed for the other devices, also demonstrate light guidance, and feature total grating coupling and waveguide losses on the order of 33.1 dB and 46.7 dB mm -1 , respectively. These results showcase the possibility of downscaling grating-coupled SCD devices for VIS-UV operation, and pave the way for exploiting diamond's properties on photonic chips at extremely short wavelengths.

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“…The chirped circular grating structures introduced here enable near-unity collection efficiency into the detection apparatus for different numerical aperture (NA). These bulk-dielectric grating structures can be fabricated in bulk diamond and do not require diamond membranes, which are not commercially available and difficult to fabricate [45][46][47]. We numerically evaluate the performance of chirped circular gratings optimized for three specific detection schemes:…”

Section: Introductionmentioning

confidence: 99%

Chirped circular dielectric gratings for near-unity collection efficiency from quantum emitters in bulk diamond

Zheng¹,

Liapis²,

Chen³

et al. 2017

Opt. Express

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Efficient collection of fluorescence from nitrogen vacancy (NV) centers in diamond underlies the spin-dependent optical read-out that is necessary for quantum information processing and enhanced sensing applications. The optical collection efficiency from NVs within diamond substrates is limited primarily due to the high refractive index of diamond and the non-directional dipole emission. Here we introduce a light collection strategy based on chirped, circular dielectric gratings that can be fabricated on a bulk diamond substrate to modify an emitter's far-field radiation pattern. Using a genetic optimization algorithm, these grating designs achieve 98.9% collection efficiency for the NV zero-phonon emission line, collected from the back surface of the diamond with an objective of aperture 0.9. Across the broadband emission spectrum of the NV (600-800 nm), the chirped grating achieves 82.2% collection efficiency into a numerical aperture of 1.42, corresponding to an oil immersion objective again on the back side of the diamond. Our proposed bulk-dielectric grating structures are applicable to other optically active solid state quantum emitters in high index host materials.

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Scalable Fabrication of Integrated Nanophotonic Circuits on Arrays of Thin Single Crystal Diamond Membrane Windows

Cited by 52 publications

References 58 publications

Air-clad suspended nanocrystalline diamond ridge waveguides

Air-clad suspended nanocrystalline diamond ridge waveguides

Down-scaling grating couplers and waveguides in single-crystal diamond for VIS-UV operation

Chirped circular dielectric gratings for near-unity collection efficiency from quantum emitters in bulk diamond

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