Scale Factor Self-Calibration of MEMS Gyroscopes Based on the High-Order Harmonic Extraction in Nonlinear Detection

Wang, Peng; Li, Qingsong; Zhang, Yongmeng; Xi, Xiang; Wu, Yulie; Wu, Xuezhong; Xiao, Dingbang

doi:10.1109/jsen.2022.3210723

Cited by 6 publications

(4 citation statements)

References 18 publications

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“…Equation (17) shows that factors such as ambient temperature can vary K cv , thereby introducing a drift in ‖x‖.…”

Section: Displacement Under Conventional Agcmentioning

confidence: 99%

“…Reference [16] proposed a thermistor‐based scale‐factor temperature self‐compensation method for adjusting the vibration amplitude reference value of the drive‐mode using gyroscope temperature. Reference [17] implemented the third‐harmonic amplitude to regulate the driving‐force amplitude based on SBR, realizing scale‐factor compensation for closed‐loop gyroscopes. These methods have good environmental adaptability and portability.…”

Section: Introductionmentioning

confidence: 99%

“…A harmonic amplitude ratio-based vibrational-displacment control system (SBR-AGC) was designed based on the theoretical concept that the SBR in a vibration signal characterizes the real vibration amplitude to suppress the adverse effects of temperature and circuit on the vibration amplitude of the drive mode in conventional automatic gain control (AGC). Compared with the other methods [15,17], the advantage of SBR-AGC is its ability to utilize the harmonic amplitude ratio as a direct detection of vibration amplitude (temperature-varying parameter) and as an input for closed-loop control to achieve real-time amplitude calibration, rather than online compensation at the signal layer. This allows the vibration amplitude to remain constant and unchanging when the temperature changes, better suppressing gyro output drift at the source.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio

Bu,

Feng,

Guo

et al. 2024

Micro & Nano Letters

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Micro‐electro‐mechanical system gyroscope detection output is susceptible to drift due to ambient temperature variations. Furthermore, the drive‐mode vibration amplitude is affected by the signal pickup circuit and structural parameters, which significantly influence the temperature drift of the bias and scale factor (SF). This study proposes a vibration amplitude control method based on harmonic amplitude sideband‐ratio (SBR), namely SBR‐AGC, which characterizes the vibration amplitude using the harmonic amplitude ratio of the vibrational electrical signal. The constancy of vibration amplitude is maintained via closed‐loop control to suppress bias and SF temperature drift. The experimental results on cobweb‐like disk resonator gyroscope reveal that the temperature coefficient of bias in the SBR‐AGC mode lies within −20 to 60°C and decreases by 36%, and the temperature coefficient of the SF lies within −10 to 50°C and decreases by 49.7%. Therefore, the environmental adaptability of the gyroscope is effectively improved.

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“…Equation (17) shows that factors such as ambient temperature can vary K cv , thereby introducing a drift in ‖x‖.…”

Section: Displacement Under Conventional Agcmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio

Bu,

Feng,

Guo

et al. 2024

Micro & Nano Letters

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show abstract

“…When a simple linear calibration model is used, its coefficients can be calculated using the least squares method. The external stimuli may be, in exceptional cases, replaced with internal ones, e.g., in the case of honeycomb disk resonator gyroscopes (HDRG), the authors of [ 4 ] analyzed the third-order harmonic component of the sensor signal to estimate the scale factor of the closed-loop sensor, as well as to compensate for its thermal drift. The authors of [ 5 ] improved the precision of the calibration procedure by detecting the outliers in the measured calibration data using the random sample consensus algorithm (RANSAC), Mahalanobis distance, and median absolute deviation.…”

Section: Introductionmentioning

confidence: 99%

Homogeneous Sensor Fusion Optimization for Low-Cost Inertial Sensors

Nemec

Andel

Šimák

et al. 2023

Sensors

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The article deals with sensor fusion and real-time calibration in a homogeneous inertial sensor array. The proposed method allows for both estimating the sensors’ calibration constants (i.e., gain and bias) in real-time and automatically suppressing degraded sensors while keeping the overall precision of the estimation. The weight of the sensor is adaptively adjusted according to the RMSE concerning the weighted average of all sensors. The estimated angular velocity was compared with a reference (ground truth) value obtained using a tactical-grade fiber-optic gyroscope. We have experimented with low-cost MEMS gyroscopes, but the proposed method can be applied to basically any sensor array.

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Automatic calibration and nonlinearity optimization for scale factor of micro-electromechanical system gyroscopes under force rebalanced operation

Shen,

Zheng,

Tong

et al. 2024

J. Micromech. Microeng.

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The paper focuses on automatic temperature sensitivity calibration and nonlinearity optimization of scale factor (SF) for MEMS gyroscopes under force rebalanced operation. Calibration of SF temperature sensitivity is done based on stiffness modulation by injecting a cosine calibration signal to modulate the resonance frequency of gyroscope drive mode. Parameters affecting gyroscope scale factor is reciprocal proportional to the loop gain of the demodulated calibration signal, enabling a calibrated temperature insensitive SF. Implementing this real time SF calibration algorithm in an FPGA platform results in a decreased SF error from 42416 ppm to 12141 ppm over temperature range of 0°C to 50°C, which is further reduced to 3526 ppm by calibrating the temperature coefficient of the gain ratio of drive and sense mode front-end excitation circuits with experiment. Additionally, we reveal that force misalignment angle is a major error source for SF nonlinearity, which is verified experimentally with the result that SF residual error within the range of 0.1deg/s-200deg/s decreases from 8550 ppm to 3963 ppm by force misalignment angle compensation with force rotation matrixes. Owing to the elimination of parameters affecting both the SF calibration loop and the real angular readout loop and further calibration of gain ratio temperature sensitivity of discrete boards, the SF error over temperature is reduced by 12 times, while the maximum SF residual error is optimized by 2 times as a result of the force misalignment angle compensation.Keywords: MEMS gyroscope, force-to-rebalance (FTR), stiffness modulation, force misalignment angle, scale factor calibration

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Scale Factor Self-Calibration of MEMS Gyroscopes Based on the High-Order Harmonic Extraction in Nonlinear Detection

Cited by 6 publications

References 18 publications

Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio

Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio

Homogeneous Sensor Fusion Optimization for Low-Cost Inertial Sensors

Automatic calibration and nonlinearity optimization for scale factor of micro-electromechanical system gyroscopes under force rebalanced operation

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