We calculate the subgap current in planar superconducting tunnel junctions with thin-film diffusive leads. It is found that the subharmonic gap structure of the tunnel current scales with an effective tunneling transparency which may exceed the junction transparency by up to two orders of magnitude depending on the junction geometry and the ratio between the coherence length and the elastic scattering length. These results provide an alternative explanation of enhanced values of the subgap current in tunneling experiments often ascribed to imperfection of the insulating layer. We also discuss the effect of finite lifetime of quasiparticles as the possible origin of additional enhancement of multiparticle tunnel currents. PACS numbers: 74.45.+c, 74.40.+k, 74.25.Fy, 74.50.+r Subgap quasiparticle current in superconducting junctions at small applied voltages eV < 2∆ is the subject of persistent theoretical interest and experimental research. Recently, the problem has attracted new attention, and a number of measurements of the subgap current in high-quality tunnel junctions have been performed, 1,2 motivated by the problem of decoherence in Josephson-junction-based superconducting qubits. 3 The subgap current at zero temperature is due to multiparticle tunneling (MPT) processes, 4 whose intensities strongly depend on the quality of the insulating layer, being enhanced by disorder, localized electronic states, pinholes, etc. 5 The effect of disorder in the junction electrodes on the subgap current has never been questioned.According to the MPT theory, 4 the subgap tunnel current depends on the transparency D of the tunnel barrier: it decreases with decreasing voltage in a steplike fashion with step heights proportional to (D/2) n at voltages eV = 2∆/n, n = 1, 2... [subharmonic gap structure (SGS)]. Similar results have been obtained for junctions with ballistic electrodes, 6 and mesoscopic point contacts with diffusive electrodes 7 on the basis of the theory of multiple Andreev reflections (MAR). 5 Experimentally, the SGS scaling parameter in atomic size junctions nicely agrees with the theory; 8 however, in macroscopic tunnel junctions it is usually much larger 1,2 (see also earlier data 9 ); moreover, there is a smooth residual current at a very low voltage.1 Although enhanced SGS in hightransmission junctions could be explained by assuming randomly distributed resonant levels within the tunnel barrier, 10 enhanced subgap current in low-transmission junctions with presumably good insulating layers remains an open question.In this paper we reexamine the problem of the subgap current in macroscopic tunnel junctions, and consider the effects of diffusive electrodes and planar junction geometry common for the experiment (see Fig. 1). Our main result is that the SGS scaling parameter for such junctions significantly exceeds the junction transparency: for the sandwich-type junction with thin-film leads shown in Fig. 1(b), the scaling is determined by the effective transparency defined aswhere ξ 0 = D/2∆ is the diffus...