Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process

Cui, Le; Marchand, Éric

doi:10.1080/15599612.2015.1034903

Cited by 11 publications

(5 citation statements)

References 28 publications

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“…The necessity of this high magnification rests upon two factors : firstly, as the form of our object is complex (one dimension is much smaller than two others) the camera must be close enough to be able to detect all of the edges; secondly, the size of visual field should be sufficient to cover all space of object movement necessary to microassembly tasks. So, we encounter the hypothesis also presented in works with Scanning Electron Microscope (24), that at high magnification the projection rays are parallel to each other and are perpendicular to the image plane, which implies the use of parallel projection model. Nevertheless, several alternative solutions may be used to measure the displacement following Z c axis.…”

Section: Discussionmentioning

confidence: 93%

Analysis of CAD Model-based Visual Tracking for Microassembly using a New Block Set for MATLAB/Simulink

Kudryavtsev

Laurent

Clevy

et al. 2015

International Journal of Optomechatronics

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Microassembly is an innovative alternative to the microfabrication process of MOEMS which is quite complex. It usually implies the use of microrobots controlled by an operator. The reliability of this approach has been already confirmed for the micro-optical technologies. However, the characterization of assemblies has shown that the operator is the main source of inaccuracies in the teleoperated microassembly. Therefore, there is a great interest in automating the microassembly process. One of the constraints of automation in microscale is the lack of high precision sensors capable to provide the full information about the object position. Thus, the usage of visual-based feedback represents a very promising approach allowing to automate the microassembly process. The purpose of this paper is to characterize the techniques of object position estimation based on the visual data, i.e. visual tracking techniques from the ViSP library. These algorithms allows to get the 3D object pose using a single view of the scene and the CAD model of the object. The performance of three main types of model-based trackers is analyzed and quantified: edge-based, texture-based and hybrid tracker. The problems of visual tracking in microscale are discussed. The control of the micromanipulation station used in the framework of our 1 Downloaded by [New York University] at 07:50 25 July 2015 A c c e p t e d M a n u s c r i p t project is performed using a new Simulink block set. Experimental results are shown and demonstrate the possibility to obtain the repeatability below 1 m. 2

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Section: Discussionmentioning

confidence: 93%

Analysis of CAD Model-based Visual Tracking for Microassembly using a New Block Set for MATLAB/Simulink

Kudryavtsev

Laurent

Clevy

et al. 2015

International Journal of Optomechatronics

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“…The calibration process aims to obtain the parameters of the geometric model that define the relationship between the world coordinate of the target and its projection in the image plane. There are two types of classical projection models, namely, perspective projection and parallel projection, which have been proven to be sufficient for most optical and electron microvision systems [51]. In general, different micro-vision systems can be classified into either perspective projection model or parallel projection model, which are listed in Table II.…”

Section: B Geometric Models and Calibration Methods Of The Typical Micro-vision Systemsmentioning

confidence: 99%

“…Different from OMs, special multi-scale calibration patterns are needed for calibrating SEMs under variational magnifications. For instance, multi-scale chessboard grids are used to determine the internal and external parameters of SEMs in the magnification range of 300× to 10000× by iteratively nonlinear minimizing the registration error [66]. Multi-scale circular patterns were designed to obtain the perspective matrix based on the general imaging model under magnifications from 20× to 500× [64], [67].…”

Section: B Geometric Models and Calibration Methods Of The Typical Micro-vision Systemsmentioning

confidence: 99%

A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications

Sheng

Pang

et al. 2021

IEEE Trans. Instrum. Meas.

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Micro/nano engineering is an emerging field which enables engineering and scientific discoveries in the microworld. As an effective and powerful tool for automation and manipulation at small scales, precision motion measurement by computer micro-vision is now broadly accepted and widely used in micro/nano engineering. Unlike other measurement methods, the vision-based techniques can intuitively visualize the measuring process with high interactivity, expansibility, and flexibility. This review paper aims to comprehensively present a survey of micro-vision-based motion measurement from the collective experience. Working principles of micro-vision systems are firstly introduced and described, where the hardware configuration, model calibration, and motion measurement algorithms are systematically summarized. The characteristics and performances of different micro-vision-based methods are then analyzed and discussed in terms of measurement resolution, range, degree of freedom, efficiency, and error sources. Recent advances of applications empowered by the developed computer micro-visionbased methods are also presented. The review can be helpful to researchers who engage in the development of micro-vision-based techniques, as well as provide the recent state and tendency for the research community of vision-based measurement, manipulation, and automation at micro/nano scales.

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“…Besides, in [15] it has been proposed to use image gradient information to perform vision-based positioning tasks and a similar process could be envisioned for an autofocus task. However, due to the parallel projection model at high magnification which is inherent to a SEM [2], the perspective projection-based control law proposed in [15] cannot be employed for the SEM. To tackle this problem, we propose in this section a direct projection model-free approach to derive the control law for full scale autofocus.…”

Section: Sharpness Function For Closed-loop Controlmentioning

confidence: 99%

“…Out of the two, passive methods are commonly employed for microscopic devices. Since the geometry and projection model of a SEM are different to optical systems [1,2], the autofocus process is different. Most of the autofocus methods are based on evaluating the image sharpness score i.e., the score should reach a single optimum of a selected sharpness function at the in-focus image.…”

Section: Introductionmentioning

confidence: 99%

Closed-Loop Autofocus Scheme for Scanning Electron Microscope

Cui

Marturi

Marchand

et al. 2015

MATEC Web of Conferences

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Abstract. In this paper, we present a full scale autofocus approach for scanning electron microscope (SEM). The optimal focus (in-focus) position of the microscope is achieved by maximizing the image sharpness using a vision-based closed-loop control scheme. An iterative optimization algorithm has been designed using the sharpness score derived from image gradient information. The proposed method has been implemented and validated using a tungsten gun SEM at various experimental conditions like varying raster scan speed, magnification at real-time. We demonstrate that the proposed autofocus technique is accurate, robust and fast.

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Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process

Cited by 11 publications

References 28 publications

Analysis of CAD Model-based Visual Tracking for Microassembly using a New Block Set for MATLAB/Simulink

Analysis of CAD Model-based Visual Tracking for Microassembly using a New Block Set for MATLAB/Simulink

A Review of Computer Microvision-Based Precision Motion Measurement: Principles, Characteristics, and Applications

Closed-Loop Autofocus Scheme for Scanning Electron Microscope

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