Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy

Liu, Tailong; Pan, Teng; Wang, Peng; Qin, Shuijie; Xie, Huikai

doi:10.1016/j.sna.2022.113377

Cited by 15 publications

(6 citation statements)

References 26 publications

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“…Among the available endomicroscopic probes, the following sample-scanning solutions can be applied: probe rotation, microprism rotation, and micromirror movement [14,15,16,17,18]. Especially remarkable is scanning by MEMS micromirror, which can be controlled by: raster scanning, circular scanning, and Lissajous scanning [9][10][11][12][13][14][15][16][17][18][19][20][21][22]. The application of the scanning trajectory using Lissajous Optical coherence tomography imaging by a fully integrated MOEMS endomicroscopy probe with Mirau micro-interferometer and twoaxis electrothermal micro-scanner using Lissajous trajectory scanning curves is an effective method for controlling the MEMS 2-axis electrothermal actuators with the micromirror.…”

Section: Introductionmentioning

confidence: 99%

“…The endomicroscopic probes presented so far using MEMS actuators with mirrors do not contain an interferometric circuit integrated in the probe. These are generally systems in the configuration of a Michelson interferometer, which is located outside the endomicroscopic probe [14,15,16,18,19,20]. In this type of systems, probes usually include a light beam forming optics, most often a GRIN lens or micro-lens and a MEMS mirror scanner [14,16,18,19,20].…”

Section: Introductionmentioning

confidence: 99%

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Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning

Struk,

Bargiel,

Józwik

et al. 2024

IEEE Sensors J.

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This report presents the results of a study focused on the development of an integrated probe intended for endomicroscopic application. A new type of transverse scanning probe is described, which was built using Mirau micro-interferometer fabricated in MOEMS (Micro-Opto-Electro-Mechanical Systems) technology; and a 2-axis electrothermal actuator fabricated in MEMS (Micro-Electro-Mechanical Systems) technology, connected with a GRIN lens collimator and single mode fiber. Herein we present a numerical analysis and an optimization of endomicroscopic probe-scanning properties, based on Lissajous curves. The key part of the report is 2D-and 3D-imaging of phantom structures, based on polymer material and USAFtarget pattern visualized with an endomicroscopy probe. The imaging was obtained by the Swept Source Optical Coherence Tomography technique (SS-OCT), working at a central wavelength λc = 1060 nm, a swept range ∆λ = 100 nm, an A-scan rate fa = 200 kHz, and the scanning of samples with the use of Lissajous curves.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning

Struk,

Bargiel,

Józwik

et al. 2024

IEEE Sensors J.

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“…Microelectromechanical systems (MEMS) mirrors, also referred to as MEMS scanners and MEMS microscanners, feature a reflective surface with diameters ranging from a few hundred micrometers to a few millimeters [ 1 ]. These reflective micromirrors can have configurations such as circular [ 2 , 3 , 4 , 5 ], rectangular [ 6 , 7 , 8 ], or elliptical shape [ 9 , 10 ]. MEMS mirrors, with their reflective surfaces, rotate along one or two scanning axes, steering the incident laser beams to the desired and designated positions.…”

Section: Introductionmentioning

confidence: 99%

“…In other words, MEMS mirrors can be utilized for not only providing but also acquiring information by illuminating the one-dimensional (1D) or two-dimensional (2D) area. Thanks to their scanning capabilities, MEMS mirrors have been utilized in diverse application fields, including projection display systems for augmented reality (AR) and virtual reality (VR) smart glasses [ 11 , 12 , 13 ], light detection and ranging (LiDAR) systems [ 3 , 4 , 7 , 10 , 14 , 15 , 16 , 17 ], and even bio-imaging applications [ 8 , 18 ].…”

Section: Introductionmentioning

confidence: 99%

Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies

Hwang,

Wysocki,

Yarar

et al. 2023

Micromachines

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In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is presented. This paper describes the structure and driving mechanism of the proposed mirror device, covering its driving characteristics in both quasi-static and resonant scan modes. Particularly, this paper deals with various achievable scan patterns including 1D line scan and 2D area scan capabilities and driving methods to realize each scanning strategy. Bidirectional quasi-static actuation along horizontal, vertical, and diagonal scanning directions was experimentally characterized and even under a low voltage level of ±20 V, a total optical scan angle of 10.4° was achieved. In addition, 1D line scanning methods using both resonant and non-resonant frequencies were included and a total optical scan angle of 14° was obtained with 100 mVpp under out-of-phase actuation condition. Furthermore, 2D scan patterns including Lissajous, circular and spiral, and raster scans were realized. Diverse scan patterns were realized with the presented AlScN-based MEMS mirror device even under a low level of applied voltage. Further experiments using high voltage up to ±120 V to achieve an enhanced quasi-static scan angle of more than 20° are ongoing to ensure repeatability. This multi-functional MEMS mirror possesses the potential to implement multiple scanning strategies suitable for various application purposes.

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“…Hardware methods have also been reported for distortion-free imaging without post-processing in OCT systems. For example, the linear motion of scanning MEMS mirrors may be obtained using an open-loop pre-shaped input signal [25], [26]. However, unlike endoscopic OCT, a distal scanning CLE further suffers from the radial distortion due to the high numerical aperture (NA) of the small-sized objective lens.…”

Section: Introductionmentioning

confidence: 99%

A MEMS Mirror-Based Confocal Laser Endomicroscope with Image Distortion Correction

et al. 2023

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Scanning MEMS mirrors can extend confocal laser microscopy into endoscopic applications, but the practical use of MEMS mirror-based confocal endomicroscopy is hindered partially by various image distortions such as barrel, fan-shaped and nonlinear distortions. In this work, the nonlinear scanning behaviors of an electrothermal MEMS mirror are analyzed and incorporated into an optical scanning model that takes all these three types of distortions into account. The model generates a 2D spatial mapping that can be applied to correct all of the image distortions in one step without a calibration board. To experimentally validate this method, a confocal laser endomicroscope employing a two-axis scanning electrothermal MEMS micromirror is designed and constructed, and confocal fluorescence images of a patterned micro-structure are obtained with the MEMS endomicroscope. The results show that the overall image distortion is reduced by at least one order of magnitude in the length direction.

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Scanning optimization of an electrothermally-actuated MEMS mirror for applications in optical coherence tomography endoscopy

Cited by 15 publications

References 26 publications

Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning

Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning

Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies

A MEMS Mirror-Based Confocal Laser Endomicroscope with Image Distortion Correction

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