Scattering of Electrons at High - Pressure and Restoration of Image Contrast in High Pressure Scanning Electron Microscopy

Abstract

It is now possible to perform High Pressure Scanning Electron Microscopy (HPSEM) in the range 10 to 2000 Pa. Here the effect of scattering on resolution has been evaluated by calculating the profile of the beam in high pressure and assessing its effect on the image contrast . An experimental scheme is presented to show that the effect of the primary beam ionization is to reduce image contrast but this effect can be eliminated by a novel use of specimen current detection in the presence of an electric field. The mechanism of image enhancement is discussed in terms of collection of additional carriers generated by the emissive components.High Pressure SEM (HPSEM) instrumentation is establishing itself as commercially viable. There are now a number of manufacturers, such as JEOL, ABT, ESCAN, DEBEN RESEARCH, selling microscopes and accessories for HPSEM. This is because high pressure techniques have begun to yield high quality micrographs at medium resolution.To study the effect of scattering on the incident electron beam, its profile - in a high pressure environment - was evaluated by calculating the elastic and inelastic scattering cross sections for nitrogen in the energy range 5-25 keV. To assess the effect of the scattered beam on the image contrast, the modification of a sharp step contrast function due to scattering was calculated by single scattering approximation and experimentally confirmed for a 20kV accelerated beam.