profiles, characteristic diffusion parameters such as diffusivity, diffusion constant, activation energy, solubility, solubility constant, and heat of solution were obtained and discussed in comparison with the case of Er 3+ diffusion. In comparison with Er 3+ diffusion, the Tm 3+ diffusion shows similar anisotropy and temperature dependence of solubility. In the aspect of diffusivity, under lower temperature the Tm 3+ has a lower diffusivity than the Er 3+ , and their diffusivity difference reduces with the increased temperature and becomes null at 1130°C.