Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Xu, Ruijuan; Lei, Anders; Christiansen, Thomas; Hansen, Karsten; Guizzetti, M.; Birkelund, Karen; Thomsen, Erik Vilain; Hansen, Ole

doi:10.1016/j.sna.2011.12.035

Cited by 82 publications

(39 citation statements)

References 19 publications

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“…Apart from the tuning of the material composition, the rest of the piezoelectric energy harvesting research has focused on the structural design and optimization for different applications. The most popular structures used in piezoelectric energy harvesters include cantilever, stack cymbal configuration, diaphragm configuration, and shear mode configuration . The cantilever structure is suitable for low input force, small acceleration, and mid‐high frequencies (tens of Hz or above), but it allows large amplitude/deformation.…”

Section: Development Of Single‐source Energy Harvestersmentioning

confidence: 99%

Energy Harvesting Research: The Road from Single Source to Multisource

2018

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Energy harvesting technology may be considered an ultimate solution to replace batteries and provide a long-term power supply for wireless sensor networks. Looking back into its research history, individual energy harvesters for the conversion of single energy sources into electricity are developed first, followed by hybrid counterparts designed for use with multiple energy sources. Very recently, the concept of a truly multisource energy harvester built from only a single piece of material as the energy conversion component is proposed. This review, from the aspect of materials and device configurations, explains in detail a wide scope to give an overview of energy harvesting research. It covers single-source devices including solar, thermal, kinetic and other types of energy harvesters, hybrid energy harvesting configurations for both single and multiple energy sources and single material, and multisource energy harvesters. It also includes the energy conversion principles of photovoltaic, electromagnetic, piezoelectric, triboelectric, electrostatic, electrostrictive, thermoelectric, pyroelectric, magnetostrictive, and dielectric devices. This is one of the most comprehensive reviews conducted to date, focusing on the entire energy harvesting research scene and providing a guide to seeking deeper and more specific research references and resources from every corner of the scientific community.

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Section: Development Of Single‐source Energy Harvestersmentioning

confidence: 99%

Energy Harvesting Research: The Road from Single Source to Multisource

2018

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“…Alignment between the two electrodes was accomplished using a contact printer (Karl Suss MA/BA6). [ 32 ] It was found that cracks from the edge extended <200 µm into the beam.…”

Section: Methodsmentioning

confidence: 99%

“…Each 0.5 µm PZT layer was grown on alternative sides of the Ni to keep the samples fl at during crystallization and suppress large curvature after crystallization due to thermal expansion mismatch between PZT fi lms and Ni foil. The low dielectric constant is caused by large of c-domain population and pores [ 19,32 ] and enhances the FoM of the PEH. Figure 3 shows the X-ray diffraction (XRD) patterns of upper and lower PZT fi lms on Ni.…”

Section: Fabrication Of Piezoelectric Compliant Mechanism Energy Harvmentioning

confidence: 99%

Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

Yeo

Rahn

et al. 2016

Adv Funct Materials

134

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wileyonlinelibrary.comdensity and reduced resonance frequency have been explored, including advanced mechanical design, [ 5 ] maximizing intrinsic piezoelectric materials properties, [ 6,7 ] and using a fl exible passive layer. [ 8,9 ] In the last decade, microelectromechanical (MEMS) energy harvesters based on piezoelectric materials such as AlN and Pb(Zr,Ti)O 3 (PZT) have been studied for use in harvesting energy from small amplitude, mechanical vibration. [10][11][12] Improving the piezoelectric material for a piezoelectric energy harvester (PEH) can be pursued via an energy harvesting fi gure of merit (FoM). The maximum extractable electric power generated at the resonance frequency of a e 31,f mode cantilever structure is [ 13,14 ] where m is mass, ω is angular frequency, Y is Young's modulus, ε 0 is vacuum permittivity, and a is the acceleration. The in-plane piezoelectric coeffi cient ( e 31,f ) and the relative permittivity ( ε r ) control the energy harvesting FoM = ( e 31,f ) 2 / ε r when the mechanical energy is stored in the passive layer. The orientation of the PZT grains strongly infl uences the fi gure of merit. [ 7,15 ] In particular, strongly (001) oriented PZT fi lms, which have a signifi cant fraction of the ferroelectric polarization directed out-of-plane, have large FoM. [ 16 ] From the standpoint of improving the toughness and reliability of the piezoelectric energy harvester, a metal foil is preferable compared to Si, the typical substrate for MEMS. [ 17 ] Moreover, thin metal foils enable low resonance frequencies without etching, and are easily machined. Morimoto et al. [ 8 ] reported a cantilever piezoelectric energy harvester using epitaxial PZT thin fi lms transferred onto stainless steel that shows output power of 5.3 µW at 5.0 m s −2 and 126 Hz without a proof mass. In much the same way, (Na 0.5 K 0.5 )NbO 3 (NKN) piezoelectric thin fi lms coated on Ni-based metal foils were investigated for vibration energy harvesters. [ 18 ] Another benefi t of using metal substrates for PEH is that copper and nickel have larger thermal expansion coeffi cients than many perovskite fi lms. This produces compressive stresses in the tetragonal PZT fi lm on cooling, increasing the volume fraction of the out-of-plane polarization direction. [ 19 ] Thus, high compressive stresses in {001} PZT fi lms give rise to an improved FoM for energy harvesting. [ 7,[19][20][21] Typical PEH designs use a fi xed-free cantilever beam confi guration with or without a proof mass. While fi xed-free Extracting energy from low vibration frequencies (<10 Hz) using piezoelectric energy harvester promises continuous self-powering for sensors and wearables. The piezoelectric compliant mechanism (PCM) design provides a signifi cantly higher effi ciency by fostering a uniform strain for its 1st mode shape, and so is interesting for this application. In this paper, a PCM energy harvester with bimorph Pb(Zr,Ti)O 3 (PZT) fi lms on Ni foil deposited by rf magnetron sputtering is shown to have high effi ciency and large power for low...

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“…A sacrificial layer containing epoxy resin and strontium carbonate SrCO 3 is first printed on an alumina substrate, followed by the subsequent printing and drying of bottom-Au electrode, PZT layer and Au top-electrode. The multilayer component is then isostatically pressed at 1kbar to improve densification [3,4]. Firing is finally performed 20 min at 900°C.…”

Section: Au/pzt/au Thick-film Processingmentioning

confidence: 99%

Piezoelectric properties of various printed PZT microsystems

Debéda

Favre

Lucat

2014

AIP Conference Proceedings

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Abstract. Free-standing PZT thick-films and completely released devices can be interesting for MEMS applications, avoiding the mechanical effect of the substrate on their electromechanical properties. Improvements of the electromechanical properties of free-standing and completely released electroded piezoelectric Au/PZT/Au thick-films with different geometries are studied. They are successfully fabricated thanks to the association of the low-cost screenprinting technology with the sacrificial layer method. Free-standing electroded and completely released PZT thick films appear promising for microsystems applications.

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Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Cited by 82 publications

References 19 publications

Energy Harvesting Research: The Road from Single Source to Multisource

Energy Harvesting Research: The Road from Single Source to Multisource

Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

Piezoelectric properties of various printed PZT microsystems

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