Sculpturing of single crystal silicon microstructures by elliptical vibration cutting

Zhang, Jianguo; Zhang, Junjie; Cui, Tao; Hao, Zhiwei; Zahrani, Ahmed Al

doi:10.1016/j.jmapro.2017.09.003

Cited by 92 publications

(18 citation statements)

References 58 publications

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“…The periodic boundary condition is applied along the y direction to mimic bulk silicon. The nominal cutting direction, tool rake/clearance angle, and phase difference were determined referring to the experimental setup [42]. The vibration amplitude and ( 4) nominal DOC are enlarged to approach the experimental scale with acceptable simulation cost.…”

Section: Details Of the Cutting Modelmentioning

confidence: 99%

“…At 300 K, obvious crack and fracture can be observed in workpiece during the tool upward movement. For brittle material like single-crystal silicon, the tool upward movement would lead to tearing off of materials and leave defects in the workpiece, which is considered as a specific problem in EVC [42]. Although these cracks can be removed by further vibration cycles, the machining stability will be impacted due to the irregularity of workpiece surface.…”

Section: Cutting Performancementioning

confidence: 99%

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Molecular Dynamics Simulation on Cutting Mechanism in the Hybrid Machining Process of Single-Crystal Silicon

Liu

Chu

et al. 2021

Nanoscale Res Lett

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In this paper, molecular dynamics simulations are carried out to investigate the cutting mechanism during the hybrid machining process combined the thermal and vibration assistants. A modified cutting model is applied to study the material removal behavior and subsurface damage formation in one vibration cycle. The results indicate that during the hybrid machining process, the dominant material removal mechanism could transform from extrusion to shearing in a single vibration cycle. With an increase of the cutting temperature, the generation and propagation of cracks are effectively suppressed while the swelling appears when the dominant material removal mechanism becomes shearing. The formation mechanism of the subsurface damage in one vibration cycle can be distinct according to the stress distribution. Moreover, the generation of the vacancies in workpiece becomes apparent with increasing temperature, which is an important phenomenon in hybrid machining process.

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Section: Details Of the Cutting Modelmentioning

confidence: 99%

Section: Cutting Performancementioning

confidence: 99%

Molecular Dynamics Simulation on Cutting Mechanism in the Hybrid Machining Process of Single-Crystal Silicon

Liu

Chu

et al. 2021

Nanoscale Res Lett

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“…Furthermore, thermal diffusion between the diamond cutting tool and the steel workpiece is significantly suppressed to prevent tool wear. At the same time, by precisely controlling the vibration amplitude in depth of cutting direction, the envelope of cutting edge trajectory can be precisely transferred into the machined surface, which leads to the successful fabrication of micro/nanostructures . It should be mentioned that the curvature radius of the vibration locus is smaller than the minimum curvature radius of the target structures to avoid undesirable over‐cutting.…”

Section: Methodsmentioning

confidence: 99%

Surface Textures Fabricated by Laser Surface Texturing and Diamond Cutting – Influence of Texture Depth on Friction and Wear

Zhang

Rosenkranz

et al. 2018

Adv Eng Mater

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In the present work, the authors study the tribological characteristics of textured stainless steel surfaces with different texture depths ranging from 1.3 to 23 mm created by laser surface texturing and ultra-precision diamond cutting. The periodicity of the surface textures is kept constant at 90 mm for each fabrication technique and texture depth. Subsequent ball-on-disk friction tests show that friction and wear can be effectively reduced by the surface texturing. It is found that the effectiveness of the surface textures greatly depends on the depth and the geometry of the textures, as well as on testing parameters such as the applied load and the sliding velocity. Surface textures with the lowest depth demonstrate a slightly increased COF as well as an increased mass loss under low loads or sliding velocities. On the other hand, surface textures with intermediate depths show a significant reduction in the COF and wear. The observed friction and wear reduction can be mainly attributed to a combined effect of the surface textures consisting of the generation of an additional hydrodynamic pressure, the storage of produced wear particles as well as the action as secondary source for lubricant (reservoir effect).

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“…Ultimate surface finish with high surface integrity, low surface roughness, and high form accuracy is crucial for achieving superior optical, electrical, and chemical corrosion resistance properties of advanced components and parts [1][2][3][4]. Among different types of micro/nano-manufacturing techniques, mechanical machining such as ultra-precision single-point diamond turning (SPDT) with ultra-fine material removal has been demonstrated as a promising technique for achieving ultra-smooth surface of a variety of materials, such as metals [5][6][7][8], semiconductor materials [9][10][11], and ceramics [12][13][14][15][16]. Specifically, in addition to utilized precision CNC lathes and ultra-sharp diamond tools, SPDT is also highly dependent on the properties of workpiece materials, primarily due to the comparable feature size of internal microstructures of workpiece materials with depth of cut (DOC), as well as cutting edge radius of diamond tools.…”

Section: Introductionmentioning

confidence: 99%

Anisotropy-Related Machining Characteristics in Ultra-Precision Diamond Cutting of Crystalline Copper

Wang

Zhang

et al. 2020

Nanomanuf Metrol

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Deformation behavior at grain levels greatly affects the machining characteristics of crystalline materials. In the present work, we investigate the influence of material anisotropy on ultra-precision diamond cutting of single crystalline and polycrystalline copper by experiments and crystal plasticity finite element simulations. Specifically, diamond turning and in situ SEM orthogonal cutting experiments are carried out to provide direct experimental evidence of the material anisotropy-dependent cutting results in terms of machined surface morphology and chip profile. Corresponding numerical simulations with the analysis of built stress further validate experimental results and reveal the mechanisms governing the material anisotropy influence. The above findings provide insight into the fabrication of ultra-smooth surfaces of polycrystalline metals by ultraprecision diamond turning.

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Sculpturing of single crystal silicon microstructures by elliptical vibration cutting

Cited by 92 publications

References 58 publications

Molecular Dynamics Simulation on Cutting Mechanism in the Hybrid Machining Process of Single-Crystal Silicon

Molecular Dynamics Simulation on Cutting Mechanism in the Hybrid Machining Process of Single-Crystal Silicon

Surface Textures Fabricated by Laser Surface Texturing and Diamond Cutting – Influence of Texture Depth on Friction and Wear

Anisotropy-Related Machining Characteristics in Ultra-Precision Diamond Cutting of Crystalline Copper

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