Sealed-cavity resonant microbeam accelerometer

Burns, D.W.; Horning, R.D.; Herb, William R.; Zook, J. D.; Guckel, H.

doi:10.1016/0924-4247(96)01135-1

Cited by 38 publications

(24 citation statements)

References 4 publications

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“…Vacuum-encapsulated polysilicon beam resonators based on a similar surface micromachining technique have been investigated extensively at Honeywell and the University of Wisconsin [11,83]. Again, polysilicon is used as resonator and cap material and silicon dioxide as a sacrificial layer.…”

Section: Encapsulation Techniques For High-q Resonatorsmentioning

confidence: 99%

“…The described technology was also used to fabricate resonators with optical drive and read-out [84,85]. Based on the vacuum-encapsulated resonant strain gages, pressure sensors [11], temperature sensors [84], and accelerometers [83] have been developed.…”

Section: Encapsulation Techniques For High-q Resonatorsmentioning

confidence: 99%

“…Figure 1.11 (a) illustrates an accelerometer design based on resonant strain gages. The device is similar to a standard piezoresistive acceleration sensor and has been investigated in different modifications [76,83,88]. A seismic mass is suspended by one or more beams which provide the restoring force.…”

Section: Accelerometersmentioning

confidence: 99%

See 2 more Smart Citations

Micromachined Resonant Sensors— an Overview

Brand

Baltes

1998

Sensors Update

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Section: Encapsulation Techniques For High-q Resonatorsmentioning

confidence: 99%

Section: Encapsulation Techniques For High-q Resonatorsmentioning

confidence: 99%

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Micromachined Resonant Sensors— an Overview

Brand

Baltes

1998

Sensors Update

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“…Recently, many resonant type physical sensors with high sensitivity and high resolution have been developed (1)(2). The principle that is commonly used for the resonant sensors is the resonant frequency change induced by a change in resonator tensile stress (3)(4)(5). The only exception is the principle of the frequency change due to a change in the resonator rigidity, which is used for the pressure sensor (6).…”

Section: Discussionmentioning

confidence: 99%

A Surface Micromachined Resonant Accelerometer Based on Rigidity Change

1998

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SummaryWe propose a surface micromachined simple resonant accelerometer based on the principle of a resonator rigidity change.The sensor consists of a parallel beam resonator and a mass. The rigidity change of the resonator is induced with a change in the cross-sectional shape of the resonator. The feasibility of this sensing principle was confirmed by FEM analysis. The FEM analysis revealed that a frequency change ratio of 10%/g and 5%/g were obtained for the basic structure and the double resonator structure, respectively. Furthermore, we confirmed that the double resonator structure had a lower cross-axis sensitivity.

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“…Results of development of high-performance resonant accelerometers were presented by Roszhart et al at Kearfott/IC Sensors(19) and Honeywell (22). These accelerometers are developed for navigation purposes, where a high resolution is required, whereas the required frequency range is low.…”

Section: Resonant Strain Detectionmentioning

confidence: 99%