The structural change of Ru/CeO 2 and Ru/SiO 2 catalysts during pretreatments was investigated by in situ Ru K edge quick-scanning X-ray absorption fine structure (XAFS) combined with temperature-programmed reduction with H 2 and X-ray diffraction (XRD). After impregnation and drying, two pretreatment sequences were applied: (i) calcination in air at 573 K and reduction with H 2 and (ii) heating in inert gas at 573 K and reduction with H 2 . In sequence (i) of Ru/CeO 2 , the extended XAFS (EXAFS) spectra showed the formation of crystalline RuO 2 during calcination. On the other hand, in sequence (ii) of Ru/CeO 2 and Ru/SiO 2 , the EXAFS results indicated that the Ru oxide was still noncrystalline after heating. The size of Ru metal particle during reduction was determined by Ru−Ru coordination number in EXAFS (CN Ru−Ru ) and reduction degree. The size was almost constant for Ru/CeO 2 (CN Ru−Ru : about 4) or Ru/SiO 2 (CN Ru−Ru : about 8) in sequence (ii), indicating the absence of aggregation. The size was increased for Ru/CeO 2 in sequence (i); however, the XRD results suggested that each RuO 2 crystallite was slowly reduced to one Ru particle. After all, aggregation during reduction was not significant for all Ru/ CeO 2 and Ru/SiO 2 catalysts.