In recent years, nanoscience and nanotechnology have made rapid progress in utilizing material properties that differ from those of the bulk state as a result of the quantum size effect.[1] When researching a subject in nanoscience, the precise synthesis or formation of the nanometer-sized object is essential, regardless of the research discipline. The formation of metal clusters that are as small as possible has been a special challenge for numerous researchers, because it has been shown that size has remarkable effects on material properties, such as electrical, [2] optical, [3] thermal, [4] magnetic, [5] and catalytic [6] properties. These unique properties are expected to be maximized in the smallest metal cluster, i.e., a single metal atom, and such expectations have been proven in some research areas, such as single-electron transistors (SETs), [7,8] magnetic anisotropy energy (MAE), [9] and ballistic magnetoresistance (BMR).[10] However, in catalysis, maximized effects are still unclear, as the formation of enough single metal atoms on supports or substrates to apply to a practical catalysis reaction is quite difficult. This is in contrast to the case of SETs, MAE, and BMR, in which the size effects are easily detectable with even one atom. It is expected that single metal atoms could show the highest catalytic activity in a structureinsensitive reaction that requires no ensemble of atoms as an active site, although they could provide inferior performances in a structure-sensitive reaction, for example, the electrochemical oxygen-reduction reaction in which 3-4 nm is generally recognized to be the optimum size of particles. To date, the routes for the formation of single metal atoms or small metal clusters on supports or substrates can be divided into two categories: chemical and physical methods. Chemical methods, such as impregnation [11] and the colloidal method, [12] enable the formation of very small metal clusters on supports or substrates and have a fairly uniform size distribution. However, about 1 nm is generally considered to be the minimum size of clusters that can be achieved with these methods, although cluster formation below 1 nm has occasionally been reported. [13][14][15] Notably, there has been no report on the formation of single metal atoms (not ligated metal complexes such as H 2 Pt(IV)Cl 6 ) with these methods. In contrast, physical methods, such as sputtering, [16,17] thermal evaporation, [18][19][20] and scanning tunneling microscopy (STM) manipulation, [21,22] have been regarded as capable of forming and manipulating even single metal atoms on demand. However, both the number of single atoms that can be formed and the kind of substrates that can be used are fairly limited with these methods, because they require quite rigorous conditions, i.e., high vacuum and/or temperature as well as expensive and complicated facilities. These physical methods are therefore adequate to form single atoms for the qualitative investigation of their material properties, but are quite limited when it ...