SELECTIVE REMOVAL OF HIGH-KGATE DIELECTRICS

Effect of rare-earth elements on the plasma etching behavior of the RE–Si–Al–O glasses

“…The proportional relationship was explained by the fact that those oxides generate highly volatile byproducts after the chemical reaction with fluorine plasma, and that result was also supported by Thienot et al [25]. Therefore, it is a very interesting result that SAY glass showed the lowest plasma etching depth among the glasses because Y generates the most volatile byproduct after the chemical reaction with fluorine plasma among the rare-earth elements in the glasses (Table 4) [21,22]. Physical and chemical etching occurs simultaneously during the plasma etching process [21,26,27].…”

“…It seems that the plasma etching test under various biases should be conducted to sufficiently understand the plasma etching behavior of the glass in the future. The degree of fluorination of each element in the glasses after the fluorine plasma exposure [21,22]. …”

“…2. The fluorination degree of the rare-earth elements was proportional to the sublimation point of the fluorinated compound (Table 4) [21,22].…”

“…Therefore, it is a very interesting result that SAY glass showed the lowest plasma etching depth among the glasses because Y generates the most volatile byproduct after the chemical reaction with fluorine plasma among the rare-earth elements in the glasses (Table 4) [21,22]. Physical and chemical etching occurs simultaneously during the plasma etching process [21,26,27]. When a fluorine based reactant gas, such as CF 4 or SF 6 , is discharged, various ions and dissociated gas are generated.…”

Polysilicon Nanowire Sensor Devices Based on High-k Dielectric Membrane for pH Sensing and DNA Detection

“…From the experimental result, the poly-Si nanowires with HfO 2 sensing film reveals the highest number of assay tests. This is due to the polycrystalline structure of HfO 2 film which is difficult to remove by the wet etch process (11). Contrastively, the TEOS SiO 2 sample shows the poor reproducibility tests, indicative of the amorphous structure that can be seriously harmed by ions in electrolyte.…”