Self-aligned silicon ring resonator optical modulator with focused ion beam error correction

Abstract

Ring resonator based silicon optical modulators have a tremendous potential for forming compact and power efficient optical transmitters. In this paper we demonstrate high speed modulation from a device based upon carrier depletion in a self aligned pn junction. Furthermore the role that focused ion beams can play in the error correction of silicon photonic devices is also demonstrated.

Recent breakthroughs in carrier depletion based silicon optical modulators

“…Since the device can be driven as a lumped element, no termination is required and therefore power dissipation in the termination is avoided. Several examples of low power and high speed resonant modulator have been demonstrated [24,48,50,51,73,74]. The sensitivity of resonant based devices to fabrication variations and temperature changes require them to be actively tuned to fix the resonance wavelength as required.…”

Integration of high performance silicon optical modulators

“…Operation at 10Gbit/s with a 18dB extinction ratio, 40Gbit/s with a 10dB extinction ratio and 50Gbit/s with a 3dB extinction ratio is demonstrated when slightly different variants are incorporated in Mach Zehnder Interferometer (MZI) structures [1,3]. A ring resonator version is also demonstrated with operation up to 40Gbit/s [4].…”

10 Gb/s Switchable Binary/PAM-4 Receiver and Ring Modulator Driver for 3-D Optoelectronic Integration

“…The ring modulator is schematically sketched in Fig. 2 [12,13]. An equivalent structure of the ring modulator is a PIN diode, and the electronic driving voltage is connected to its positive and negative terminals, as shown in the Fig.…”