2002
DOI: 10.1016/s0022-0248(01)02212-6
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Self-assembled Ge quantum dots on Si and their applications

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Cited by 50 publications
(28 citation statements)
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“…More recently, selective growth of islands in the patterned nanoscale region, or pattern guided growth, has been proposed and has attracted considerable attention. Patterned assisted QDs with precisely controlled site placement, size distribution and dot density have been realized in various nanostructures, including buried dislocation networks [43], stripe mesas [44], 2D hexagonal pits array [45] and lithography-based optical interference patterns [46]. Due to ordering of growth patterns, 2D and 3D QD arrays with perfect site periodicity and size distribution can be obtained provided that the growth parameters are optimized.…”
Section: Epitaxial Growth Of Germanium On Siliconmentioning
confidence: 99%
“…More recently, selective growth of islands in the patterned nanoscale region, or pattern guided growth, has been proposed and has attracted considerable attention. Patterned assisted QDs with precisely controlled site placement, size distribution and dot density have been realized in various nanostructures, including buried dislocation networks [43], stripe mesas [44], 2D hexagonal pits array [45] and lithography-based optical interference patterns [46]. Due to ordering of growth patterns, 2D and 3D QD arrays with perfect site periodicity and size distribution can be obtained provided that the growth parameters are optimized.…”
Section: Epitaxial Growth Of Germanium On Siliconmentioning
confidence: 99%
“…The 4.16% mismatch between the Si and the Ge lattice constants allows nanocrystalline Ge (nc-Ge) dots self-assemble to incorporate into the Si CMOS technology [100]. The smaller bandgap and the light effective masses of carriers allow the nc-Ge dot to considerably enhance the tunneling current through an empty valence band.…”
Section: Silicon Nanocrystals Memory Devices and Other Quantum Dot Mementioning
confidence: 99%
“…These possibilities have made QD like systems to become unusually attractive objects for both fundamental physics research and device applications. These systems have potentials to use for high speed, high efficiency optoelectronics and photonic devices, quantum dot lasers, high density memory or biosensing and biolabeling [3][4][5][6].…”
Section: Introductionmentioning
confidence: 99%