configurations are no longer sufficient, either in terms of realizing certain crucial functionalities or in performance improvement. Compared to 2D structures, 3D structures have one more dimension, which enables more diversity in structure/ device design and is crucial in realizing richer physical interactions, better performance, and advanced functionalities. For example, to obtain a negative permeability from split ring resonators (SRRs) to construct negative index metamaterial, a vertical configuration of SRRs is needed to couple with the magnetic field, while planar SRRs can only couple with the electric field to obtain a negative permittivity. [4] With respect to device performance, 3D gold helixes [5] have larger polarization contrast than 2D chiral structures, [6] and dynamic 3D microcontainers [7] can realize drug delivery in a much more controllable way than absorption on 2D structures. [8] Therefore, 3D micro/nanostructures are of significant importance in such scenarios, acting as an indispensable supplement to the present 2D micro/nanostructures. However, the fabrication of 3D micro/nanostructures is a formidable challenge with the state-of-the-art equipment, because the traditional planar process cannot be used directly due to its 2D projection nature.Much effort has been devoted in past decades, and significant progress has been demonstrated with 3D micro/nanofabrication, which can be divided into two types of strategies. The first one is brand new technologies/equipment development, including 3D laser direct writing (LDW) [9] and focused ion beam (FIB) [10] processing using two-photon polymerization and ion beam milling/deposition to construct 3D structures. Great scientific advantages have been demonstrated in the fields of mechanics, optics, and biology using these techniques. [11] However, due to their intrinsic point-by-point writing style, the efficiency of LDW and FIB is limited. Moreover, the materials that can be proceeded by the two techniques are usually photoresists (two-photon absorption) and metals (FIB-assisted deposition), and transferring to other materials can be quite challenging in most cases. [5,12] The other strategy is a combination or modification of the technologies in planar processes (including lithography, deposition, and etching) and is referred to as "planar technology" in this review. In this strategy, a variety of 3D fabrication methods have been developed, such as multilayer stacking, [13] oblique angle deposition, [14] and self-aligned Compared to their 2D counterparts, 3D micro/nanostructures show larger degrees of freedom and richer functionalities; thus, they have attracted increasing attention in the past decades. Moreover, extensive applications of 3D micro/nanostructures are demonstrated in the fields of mechanics, biomedicine, optics, etc., with great advantages. However, the mainstream micro/nanofabrication technologies are planar ones; therefore, they cannot be used directly for the construction of 3D micro/nanostructures, making 3D fabrication at the m...