Physical and electrical properties of screen-printed Ag thick-film contacts were studied and correlated to understand and achieve good-quality ohmic contacts to high-sheet-resistance emitters for solar cells. Analytical microscopy and surface analysis techniques were used to study the Ag-Si contact interface of three different screen-printed Ag pastes ͑A, B, and PV168͒ subjected to high ͑ϳ835°C͒ and conventional ͑740-750°C͒ temperature firing conditions. At ϳ750°C firing, all three pastes failed on a 100 ⍀/ᮀ emitter because of incomplete etching of the silicon nitride film ͑PV168͒, an irregular small distribution of regrown Ag crystallites ͑paste A͒, or an excessive diffusion of Ag into the p-n junction ͑paste B͒. At a firing temperature of ϳ835°C, paste A gave a lower open-circuit voltage because of the diffusion of Al from the glass frit into the emitter region. Paste B failed because of the formation of very large ͑0.3-1 m͒ Ag crystallites that shunted the p-n junction. Of the three pastes, the PV168 paste from DuPont gave the best contact quality on a 100 ⍀/ᮀ emitter with a solar cell fill factor of 0.782 only after annealing in a hydrogen atmosphere.Screen-printed ͑SP͒ solar cells have been around for about three decades; however, little is understood about the physics and chemistry of the formation of thick-film silver contacts to the Si emitter, as well as carrier transport at and near the Ag-Si interface and its precise correlation with the quality of the ohmic contact. The main fill factor ͑FF͒ loss mechanisms associated with SP metallization are shown in Fig. 1. As illustrated in the figure, the n + P diffusion forms the emitter region for the p-base single-junction Si solar cell. The contact resistance and gridline resistivity both depend on the firing cycle and the properties of the inorganic constituents of the SP paste. For SP solar cells, the location of high series resistance is at the Ag thick film/Si contact interface. 2 The junction leakage and shunting characteristics depend mainly on the emitter profile, firing cycle, and the paste constituents.Conventional emitters are homogeneously doped with a sheet resistance normally in the range of 35-55 ⍀/ᮀ. Reasonably goodquality SP Ag contacts are routinely achieved on ϳ45 ⍀/ᮀ emitters, while making good ohmic contacts to high-sheet-resistance ͑80-100 ⍀/ᮀ͒ emitters is still a challenge. Nevertheless, low-sheetresistance emitters contribute to loss in cell performance because of heavy-doping effects and high surface-recombination velocity. For this reason selective-emitter processes have been developed. 3-5 The advantages of a selective-emitter cell include a lower contact resistance resulting from the heavier doping underneath the metal grid and higher short-circuit current and open-circuit voltage resulting from the improved short-wavelength response and front-surface passivation of the lightly doped region between the metal gridlines. An alternative route, which is investigated in this paper, is to directly optimize the SP contacts to a homogeneous...