2005
DOI: 10.1149/1.2001507
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Understanding the Formation and Temperature Dependence of Thick-Film Ag Contacts on High-Sheet-Resistance Si Emitters for Solar Cells

Abstract: Physical and electrical properties of screen-printed Ag thick-film contacts were studied and correlated to understand and achieve good-quality ohmic contacts to high-sheet-resistance emitters for solar cells. Analytical microscopy and surface analysis techniques were used to study the Ag-Si contact interface of three different screen-printed Ag pastes ͑A, B, and PV168͒ subjected to high ͑ϳ835°C͒ and conventional ͑740-750°C͒ temperature firing conditions. At ϳ750°C firing, all three pastes failed on a 100 ⍀/ᮀ e… Show more

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Cited by 78 publications
(34 citation statements)
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“…The low maximum etch depth z max ¼ 45 nm of the un-irradiated shallow furnace diffused emitter is smaller than typical etch depths z paste % 60 nm of screen printing pastes [21], explaining the measured high macroscopic contact resistivities r c > 400 mV cm 2 without add-on laser doping. The significantly deeper doping profile of the laser irradiated samples increases z max to values high above the etch depth, thus widening the process window for the firing of screen printed contacts and avoiding metal spiking through the pn-junction [22]. Figure 5 illustrates the efficiency potential of SE compared to standard cells by reducing the finger width w f .…”
Section: Discussionmentioning
confidence: 99%
“…The low maximum etch depth z max ¼ 45 nm of the un-irradiated shallow furnace diffused emitter is smaller than typical etch depths z paste % 60 nm of screen printing pastes [21], explaining the measured high macroscopic contact resistivities r c > 400 mV cm 2 without add-on laser doping. The significantly deeper doping profile of the laser irradiated samples increases z max to values high above the etch depth, thus widening the process window for the firing of screen printed contacts and avoiding metal spiking through the pn-junction [22]. Figure 5 illustrates the efficiency potential of SE compared to standard cells by reducing the finger width w f .…”
Section: Discussionmentioning
confidence: 99%
“…However, at 750°C firing, high FF was achieved only for medium-high and high T g glass Ag pastes (33-462 and 33-455). This demonstrates that, unlike the case with the PV168 Ag paste, 10,11 a high firing temperature of 835°C is not always necessary to achieve a good ohmic contact to the 100 V/sq emitter, provided high T g glass and fast belt speed are used. However, lower T g glass frits GF1 (33-460) and GF2 (33-452) gave significantly lower FFs for the 750°C firing.…”
Section: Effect Of Glass Transition Temperature On the Contact Behavimentioning
confidence: 98%
“…When the screen-printed Ag paste is fired, the glass frit acts both as an etching agent of the SiN x antireflection coating (ARC) layer deposited on the n + -Si emitter and as a transport medium for Ag in the bulk paste to precipitate at the paste/emitter interface [1][2][3][4][5][6][7][8][9][10]. A dense population of fine Ag crystallites at the paste/Si interface is desirable for achieving good quality ohmic contact with the Si emitters [6][7][8]10].…”
Section: Introductionmentioning
confidence: 99%