2002
DOI: 10.1111/j.1151-2916.2002.tb00032.x
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Self‐Lubrication of Chlorine‐Implanted Titanium Nitride Coating

Abstract: Chlorine implantation into TiN coatings decreases the wear loss and the friction coefficient. Even by low-dose chlorine implantation, the wear volume is decreased by three orders of magnitude or more, and the friction coefficient becomes <0.1. This self-lubrication mechanism is related to the presence and mobility of implanted chlorine atoms inside the columnar TiN microstructure. According to observations of chlorineimplanted TiN coatings using high-resolution transmission electron microscopy, the chlorine at… Show more

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Cited by 23 publications
(10 citation statements)
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References 17 publications
(13 reference statements)
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“…The films were polycrystalline with a columnar structure of 50-60 nm grains and the film thickness was 2 µm. 5,6 Single-charged chlorine ions were implanted into the TiN film at a dose of 1.0 ð 10 17 ions cm 2 at 100 keV under high vacuum (2.0 ð 10 5 Pa). 6 A stainless-steel ball with a diameter of 6 mm was used for the ball-on-disc sliding test.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The films were polycrystalline with a columnar structure of 50-60 nm grains and the film thickness was 2 µm. 5,6 Single-charged chlorine ions were implanted into the TiN film at a dose of 1.0 ð 10 17 ions cm 2 at 100 keV under high vacuum (2.0 ð 10 5 Pa). 6 A stainless-steel ball with a diameter of 6 mm was used for the ball-on-disc sliding test.…”
Section: Methodsmentioning
confidence: 99%
“…4 Implantation of Cl C to chemically treat TiN films was carried out to improve the tribological properties: 5 the friction coefficient of the TiN film (¾2 µm thick) without Cl C implantation was ¾0.8, whereas it was <0.2 for the TiN film with Cl C implantation. 6 In order to clarify the effect of Cl C implantation on the friction coefficient, we analysed the surfaces of TiN films with/without Cl C implantation by scanning XPS. Both TiN films were subjected to a ball-on-disc sliding test with a stainless-steel ball, resulting in round, 150 µm wide scratches on the surface.…”
Section: Introductionmentioning
confidence: 99%
“…As partially included in Table 1, the authors 6,11,[14][15][16][17] have proposed the importance of chemical surface modification to accommodate the self-protection and self-lubrication to coating films. In a similar manner to the conventional physical modification via the argon implantation, 8) significant amount of dislocations are induced with enhancement of implanted atom doses.…”
Section: Introductionmentioning
confidence: 99%
“…Depending on the type, the size and its distribution of these precipitates, the mechanical properties as well as the wearing/corrosion performance are positively controlled in practice. In the recent studies, the ion implantation enables us to change the old-fashioned concept of surface modification: [4][5][6] chlorine implantation significantly reduces the wearing volume of sample and counter materials and the friction coefficient. This technological impact toward the dry forming and machining is to be further discussed in Ref.…”
Section: Introductionmentioning
confidence: 99%