“…19 Although the underlying soft substrate is often a poly(dimethylsiloxane) (PDMS) elastomer, the stiff thin top layer is made from various materials, including metals (e.g., gold, 1 platinum, 20 and aluminium 21 ) deposited using evaporation or sputtering, polystyrene spin-coated from its toluene solution, 22 polyacrylate derived from plasma polymerization, 23 and zinc oxide prepared using spin-coating of a precursor followed by sol-gel reaction. 24 The stiff thin layer can also be obtained by oxidizing the surface of PDMS in order to form a silicate layer using oxygen plasma, 5 UV-ozone (UVO) treatment, 17,25 and ion beams. 26 Cross-linking reactions induced by UV-ozone treatment 11 and chemical oxidization 27 can also stiffen the PDMS surface.…”