Self-Rolled Multilayer Metasurfaces

Abstract

Multilayer metasurfaces (MLMs) represent a versatile type of three-dimensional optical metamaterials that could enable ultra-thin and multi-functional photonic components. Herein we demonstrate an approach to readily fabricate MLMs exploiting a thin film self-rolling technique.As opposed to standard layer-by-layer approaches, all the metasurfaces are defined within a single nanopatterning step, significantly reducing fabrication time and costs. We realize two MLMs platforms relying on widely used nanopatterning techniques, namely focused ion-beam and electron-beam lithographies. A first example are MLMs comprised of nanohole patterns structured into metal-dielectric seed bilayers. The second platform is comprised of vertical stacks of angled plasmonic nanorod arrays separated by thin dielectric layers. Such angled MLMs exhibit a selective response to circularly polarized light, in agreement with previous works relying on layerby-layer processes. Our approach can pave the way for the efficient prototyping of novel MLMs, such as devices with varying number of layers and configurations that can be fabricated on a single chip.

A Review on Metasurface: From Principle to Smart Metadevices

“…There is almost no metasurface developed around the arc surface of the fiber, let alone the metasurface inside of the photonic crystal fiber. More recently, Steiner and co-workers proposed a 'self-rolled multilayer metasurfaces' based on templates that can roll themselves up [12]. This method is similar to the Nanoimprint lithography [47,131,132], while implemented on the soft materials.…”

“…Thus, the realization of flexible (or soft) metasurface becomes one of the emerging topics nowadays. Soft Metasurfaces are normally being fabricated with metal, metal-dielectric structures, or only dielectric materials deposited over a flexible substrate [12,22,69], which are now considered to be the competitive platform for controlling the optical properties of the output light with mechanical force [20]. Meta-structures recently are being developed over flexible polymer [66], 2D materials [61,99], or carbon nanofilms [138].…”

Wafer‐Scale High‐Quality Microtubular Devices Fabricated via Dry‐Etching for Optical and Microelectronic Applications

“…In contrast to the nanoscale where the self‐assembly is driven by chemical functional group interactions, on the microscale strain engineering forms an elegant way to create 3D microstructures from lithographically patterned 2D thin films. Notorious examples are microcylinders, [ 1,2 ] cubes, [ 3 ] and other polyhedrons, [ 4 ] which have already found applications, for instance, in electronics, [ 5–7 ] photonics, [ 8,9 ] and biology. [ 10–12 ] Self‐assembly by the roll‐up of structured thin‐film stacks into tubular “Swiss rolls” has been particularly successful in creating micromachined devices such as inductors, [ 13,14 ] capacitors, [ 15,16 ] microrobots, [ 17–19 ] and optical resonators [ 20–22 ] to only name a few.…”

A transversely localized light in a waveguide: the analytical solution and its potential application

“…Such type of the waveguides is included as a key part in many structures (e.g. Metal insulator metal waveguide with bends [24], as a part of the split-ring resonators [25], or as a subwavelength hole in a thick screen [26], or as an approximation model for V-groove waveguide [27]), waveguide arrays, etc. (see [28] and references there).…”

“…The existing theoretical approaches permit only the approximate solutions of the transcendental equation in three limiting cases: i) near cuttoff, ii) at short-wave limit Lω/c ≫ 1, and iii) in the strongly asymmetrical case (see, for example [22]). While the nanowaveguide structures characterized by the intermediate sizes (Lω/c ≤ 1) are studied only by the numerical methods [22,43] (see also recent works [24][25][26][27][29][30][31][32][33][34][35][36]).…”