Self-sustained volume discharge

Осипов, В. В.

doi:10.1070/pu2000v043n03abeh000602

Cited by 56 publications

(25 citation statements)

References 45 publications

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“…In [11][12][13] it was shown, that the breakdown of long gaps at high pressure of gases occurs in the form of the ionization wave which characterized by an amplification of electric field strength in the zone of its front. Features of formation of high-voltages nanosecond discharges in the uniform electric field have been analyzed in the reviews [14,15]. In [1] the leading role of runaway electrons in the process of breakdown and subsequent discharge dynamics is noted, and in [16] the concept of breakdown of the discharge gap under these conditions of excitation in the form of the wave of a background electrons multiplication was presented.…”

Section: Introductionmentioning

confidence: 99%

Breakdown features of a high-voltage nanosecond discharge initiated with runaway electrons at subnanosecond voltage pulse rise time

Ломаев¹,

Белоплотов

Тарасенко

et al. 2015

IEEE Trans. Dielect. Electr. Insul.

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In the wide pressure range of the pure nitrogen and sulfur hexafluoride with small admixture of nitrogen (2,5%) the development of the breakdown during the formation of diffuse discharges initiated by runaway electrons and X-Ray was investigated. Nanosecond voltage pulses of both polarities with an amplitude up to ~300 kV and risetime of ~0.5 ns applied across the discharge gap did provide sharply nonuniform electric field distribution. Estimations of average propagation velocity of the ionization wave in the nitrogen and mixture sulfur hexafluoride with nitrogen were performed on the basis of data on dynamics of radiation intensity of the second positive (2 + ) nitrogen system from various regions along of the longitudinal axis of interelectrode gap. Interrelation between the glow dynamics and the local value of the electric field strength has been defined. The results showed that the breakdown is developed in the form of the ionization wave propagating from the potential electrode with the highest concentration of the electric field to the flat-grounded one. In the regions near the grounded electrode practically simultaneous increasing of radiation intensity is registered, that indicates on a possible change of the breakdown mechanism in this part of the discharge gap.Index Terms -Gas discharges, electric breakdown, high-voltage breakdown, ionization wave propagation, spontaneous emission, electric fields.

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Section: Introductionmentioning

confidence: 99%

Breakdown features of a high-voltage nanosecond discharge initiated with runaway electrons at subnanosecond voltage pulse rise time

Ломаев¹,

Белоплотов

Тарасенко

et al. 2015

IEEE Trans. Dielect. Electr. Insul.

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“…This speculation would be supported by that when the rise time is rapid, the breakdown voltage increases, and laser performance is improved. 10 Designing a lower residual inductance for the final stage of the MPC, we improved the SL2 structure and the MPC connection to the laser chamber. Then, the voltage rise time T r across the main discharge electrodes was reduced to 50-60 ns from Ͼ100 ns.…”

Section: Pulse Power Modulementioning

confidence: 99%

High-repetition-rate (6kHz) and long-pulse-duration (50ns) ArF excimer laser for sub-65nm lithography

Kakizaki

Sasaki

Inoue

et al. 2006

Review of Scientific Instruments

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Development of high-repetition-rate ArF excimer lasers is vital requirement for achieving high throughput and high energy-dose stability in a scanner system. ArF excimer laser, with increasing light pulse duration, can reduce the peak power without the energy-dose change. Then, the spectral bandwidth ⌬ FWHM becomes narrower by increasing the number of light round trips in a cavity, and optical damage is reduced from high-peak power. Laser operation exceeding 4 kHz is needed for next-generation technologies that can enable high numerical aperture and development of high-throughput scanners. In the present work, we examined the possibilities of achieving a repetition rate to 6 kHz from 4 kHz in the ArF laser the authors developed, taking the following innovations. The spatial width of discharge region was reduced by about 30%. The uniform gas flow condition between the electrodes was obtained by improving gas flow guides. As a result, we have obtained an average power of 42 W, a standard deviation for pulse-to-pulse energy of 3.5%, and an integral-square pulse width T is of 44 ns at 6 kHz for ⌬ FWHM Ͻ 0.40 pm. Finally, it was concluded that developing a 6 kHz ArF excimer laser for the next-generation sub-65 nm lithography is feasible.

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“…After the ionization wave returns to the cathode (when the cathode sheath begins to form), marginal spatial nonuniformity appears at the periphery of the cathode surfaces near the side walls (see Figs As it was shown earlier (see e.g. [9][10][11][12]), the development of discharge is very sensitive to any initial inhomogeneity on and near to the cathode surface which can lead to constriction (or filamentation) during further discharge evolution. The inhomogeneity can be created artificially on the cathode surface as it was done in [10].…”

Section: D Characteristicsmentioning

confidence: 88%

“…Because the residual plasma density n 0 at the end of the afterglow period is ∼ 10 13 m −3 , the pulsed discharge develops spatially homogeneously across the dielectric surfaces, as it was discussed in numerous publications (see, e.g. [8,9]). After the ionization wave returns to the cathode (when the cathode sheath begins to form), marginal spatial nonuniformity appears at the periphery of the cathode surfaces near the side walls (see Figs As it was shown earlier (see e.g.…”

Section: D Characteristicsmentioning

confidence: 97%

2D Simulations of Short‐Pulsed Dielectric Barrier Discharge Xenon Excimer Lamp

Bogdanov¹,

Kudryavtsev

Arslanbekov

2006

Contrib. Plasma Phys.

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Self-consistent two-dimensional (2D) simulations of short-pulsed dielectric barrier discharge (DBD) in pure xenon have been performed. It is shown that during short current pulse the traversal inhomogeneity of the plasma parameters can be important only at the end of the current pulse as an edge effect close to the side walls. During the current pulse, the gap voltage drops until the ionization wave reaches the cathode so the current in the cathode sheath is the displacement current. This means that almost all of the absorbed power is deposited into excitation of xenon atoms and not to the ion heating in the cathode sheath as in the traditional glow discharges. This fact is one of the reasons of high efficiency of short-pulsed DBD. The developed model allows one to estimate the temporal position of the plasma-sheath boundary.

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Self-sustained volume discharge

Cited by 56 publications

References 45 publications

Breakdown features of a high-voltage nanosecond discharge initiated with runaway electrons at subnanosecond voltage pulse rise time

Breakdown features of a high-voltage nanosecond discharge initiated with runaway electrons at subnanosecond voltage pulse rise time

High-repetition-rate (6kHz) and long-pulse-duration (50ns) ArF excimer laser for sub-65nm lithography

2D Simulations of Short‐Pulsed Dielectric Barrier Discharge Xenon Excimer Lamp

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