SEM / EDS - a nearly universal tool for fly ash analysis?

Summary: Automated analysis of submicron particles by computer-controlled scanning electron microscopy is generally possible. The minimum diameter of the detectable particles is dependent on the mean atomic number of the particles and the operating parameters of the scanning microscope. The main limitation with regard to particle size is set by the quality of the particle detection system, which generally is the backscatter electron detector. The accuracy of the results of the x-ray analyses is very often strongly affected by specimen damage, omnipresent especially for environmental particles even at low electron energies and probe currents. With the exception for light elements, the detection limit is approximately 1 wt%. Device-related limitations to automated analysis may be specimen drift and an unreliable autofocus function.

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Automated analysis of submicron particles by computer‐controlled scanning electron microscopy

Poelt

Schmied

Obernberger

et al. 2002

Scanning

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Analysis of submicron particles by scanning electron microscopy‐energy‐dispersive X‐ray spectrometry—accuracy of size measurement

2006

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Summary:Scanning electron microscopy combined with energy-dispersive x-ray spectrometry (SEM-EDXS) is widely used for particle analysis. In the case of submicron particles, especially for particles that are smaller than 300 nm, the measured particle size is influenced by specimen preparation, SEM operating parameters, the mean atomic number of the particles, and the threshold value used for binarization. The use of uncoated particles on a conductive substrate and image acquisition using an in-lens detector are recommended for precise morphologic results in this size range.

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SEM / EDS - a nearly universal tool for fly ash analysis?

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Automated analysis of submicron particles by computer‐controlled scanning electron microscopy

Automated analysis of submicron particles by computer‐controlled scanning electron microscopy

Analysis of submicron particles by scanning electron microscopy‐energy‐dispersive X‐ray spectrometry—accuracy of size measurement

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