2011
DOI: 10.1088/0957-4484/22/42/425302
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SEM-induced shrinking of solid-state nanopores for single molecule detection

Abstract: We have investigated the mechanism by which the diameter of solid-state nanopores is reduced by a scanning electron microscope. The process depends on beam parameters such as the accelerating voltage and electron flux and does not involve simple electron-beam-induced deposition of hydrocarbon contaminants. Instead, it is an energy-dependent process that involves material flow along the surface of the nanopore membrane. We also show that pores fabricated in this manner can detect double stranded DNA.

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Cited by 44 publications
(39 citation statements)
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“…In other words, detecting 1 μm particles or microorganisms such as bacteria requires a 2–3 μm diameter pore. Solitary pores with micro or nanoscale diameters used in solid‐state resistive pulse sensors can be easily fabricated using top‐down fabrication methods employing focused ion or electron beams . Along with the pore diameter, pore length also influences the detection resolution.…”
Section: Introductionmentioning
confidence: 99%
“…In other words, detecting 1 μm particles or microorganisms such as bacteria requires a 2–3 μm diameter pore. Solitary pores with micro or nanoscale diameters used in solid‐state resistive pulse sensors can be easily fabricated using top‐down fabrication methods employing focused ion or electron beams . Along with the pore diameter, pore length also influences the detection resolution.…”
Section: Introductionmentioning
confidence: 99%
“…Despite this limitation, the transition from one setup to the other is quick and straightforward. In comparison with existing techniques for controlling nanopore size such as the use of SEM 5 , thermal oxidation and membrane reshaping 8 , high electric fields offer a faster, more precise and less expensive methodology that can be performed on the lab bench using standard equipment and provide a broader range of nanopore sizes. The ability to rapidly and reproducibly reduce low-frequency noise also makes initial fabrication more reliable and prolongs the lifetime of solid-state nanopores, as previously used pores can be rejuvenated for further experiments.…”
Section: Figure 3amentioning
confidence: 99%
“…However, the creation of a nanopore in a thin insulating membrane remains challenging. Fabrication methods involving specialized focused electron beam systems can produce well-defined nanopores, but yield of reliable and low-noise nanopores in commercially available membranes remains low 2,3 and size control is nontrivial 4,5 . Here, the application of high electric fields to fine-tune the size of the nanopore while ensuring optimal low-noise performance is demonstrated.…”
Section: Introductionmentioning
confidence: 99%
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“…The process of nanopore drilling can be undertaken using a focused ion beam [41] for pore sizes >20 nm, or a field-emission transmission electron microscope (TEM) [28] for pore sizes in the range of 1–30 nm. Focused electron beams are capable of direct atomic displacement via “knock-on” collisions [42].…”
Section: Introductionmentioning
confidence: 99%