SEM investigation of pillared microstructures formed by electrochemical anodization

Vorobyova, A. I.; Sokol, V.; Outkina, E. A.

doi:10.1007/s003390050808

Cited by 18 publications

(11 citation statements)

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“…The pore separation and cell diameter were estimated from micrographs of pillar arrays produced as in [6]. These quantities were found to have close values and to vary as the barrier-layer thickness of the cells.…”

Section: Resultsmentioning

confidence: 99%

“…Aside from fragmentation, the stress imparts a degree of order to the spatial distribution of oxide grains. This phenomenon is employed in the two-step technique of making homogeneous anodic-oxide films containing a pore array [5,6].…”

Section: Resultsmentioning

confidence: 99%

“…For making pore arrays in thin films, techniques have been devised that entail multistep processing [5,6] or preforming a specific pattern on a starting aluminum film that will define the desired arrangement of pores [7]. The latter approach is faced with the tricky task of fabricating a precision stamp to the surface pattern.…”

Section: Introductionmentioning

confidence: 99%

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Making Anodic Alumina Thin Films Having a Pore Array

Vorobyova

Outkina

2005

Russ Microelectron

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An experimental investigation is reported into the influence of the grain structure of a starting Al film on the surface and bulk structure of the resulting porous anodic-oxide film with a view to making pore arrays based on oxide thin films. The electrolytes employed essentially contain a rare-earth metal. Anodic-oxide films are obtained with thicknesses ranging from 1.0 to 2.5 µ m and with a cell diameter uniform within 8% over an area of 5 × 5 µ m 2 , the grain diameter of the Al film being 0.60-0.83 µ m. THIN FILMS

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

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Making Anodic Alumina Thin Films Having a Pore Array

Vorobyova

Outkina

2005

Russ Microelectron

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“…Способ формирования низкоразмерных структур путем анодирования слоев вентильных металлов (Ti, Ta, Nb, Hf, Zr, W) через поры анодного оксида алюминия (АОА) известен довольно давно [1][2][3], однако получил интенсивное развитие в последние годы благодаря открывающимся перспективам применений систем таких наноструктур в новых элементах микро-, нано-и оптоэлектроники [4][5][6][7][8]. Создавая маску из АОА заданных размеров и подбирая специальные условия и режимы, можно создавать металлоксидные наноструктуры специфической формы (холмики, столбики, колонны c модулированным диаметром [9] и т.…”

Section: Introductionunclassified

Столбиковые Ниобиевые Оксидные Наноструктуры: Механизм Образования, Микроструктура И Электрофизические Свойства

Горох¹,

Плиговка²,

Лозовенко³

2019

Журнал Технической Физики

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The morphology and microstructure of the columnar niobium oxide nanostructures were investigated. The dependences of their morphological sizes on the anodization voltages (100–450 V) and anodic alumina pore diameters (40–150 nm) were established. The features of ion transfer in the process of niobium local anodizing were investigated and the transport numbers of electrolyte anions and niobium cations were calculated. The formation and growth mechanism was proposed and discussed. The phase composition and electrophysical properties of the column nanostructures were investigated.

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“…On the other hand, AAO formation on metal substrate with overlying Al film produces rather interesting biphasic microstructure. 16,17 Experiments of anodization on superimposed binary metals have been performed extensively to elucidate cationic transport mechanism in oxide barrier films. 18,19 In analyzing the Al-Ta and Al-Nb systems, Mozalev et al have provided invaluable insights on the mechanism responsible for nanostructure formation.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of ordered Ta₂O₅ nanodots using an anodic aluminum oxide template on Si substrate

Yang

Chen

et al. 2007

J. Mater. Res.

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Ordered arrays of Ta2O5 nanodots were prepared using anodic aluminum oxide (AAO) as a template to support localized oxidation of TaN. Films of TaN (50 nm) and Al (1.5 μm) were deposited successively on p-type Si wafers and followed by a two-step anodization process at 40 V using oxalic acid as the electrolyte. The first anodization promoted growth of irregular AAO from overlying Al film. After chemical etching, the second anodization was performed to develop well-organized AAO channels and initiate oxidation of underlying TaN film to form tantalum oxide nanodots at the AAO pore bottoms. X-ray photoelectron spectroscopy results confirmed the chemical nature of nanodots as stoichmetric Ta2O5. X-ray diffraction demonstrated the amorphous characteristic of Ta2O5. As shown in field-emission scanning electron microscopy and transmission electron results, the Ta2O5 nanodots exhibited a hillock structure 80 nm in diameter at the bottom and 50 nm in height. We also synthesized 30-nm nanodots by adjusting AAO formation electrochemistry. This demonstrates the general applicability of the AAO template method for nanodot synthesis from nitride to oxide at a desirable size.

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SEM investigation of pillared microstructures formed by electrochemical anodization

Cited by 18 publications

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Making Anodic Alumina Thin Films Having a Pore Array

Making Anodic Alumina Thin Films Having a Pore Array

Столбиковые Ниобиевые Оксидные Наноструктуры: Механизм Образования, Микроструктура И Электрофизические Свойства

Fabrication of ordered Ta₂O₅ nanodots using an anodic aluminum oxide template on Si substrate

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SEM investigation of pillared microstructures formed by electrochemical anodization

Cited by 18 publications

References 0 publications

Making Anodic Alumina Thin Films Having a Pore Array

Making Anodic Alumina Thin Films Having a Pore Array

Столбиковые Ниобиевые Оксидные Наноструктуры: Механизм Образования, Микроструктура И Электрофизические Свойства

Fabrication of ordered Ta2O5 nanodots using an anodic aluminum oxide template on Si substrate

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Fabrication of ordered Ta₂O₅ nanodots using an anodic aluminum oxide template on Si substrate