2002
DOI: 10.31399/asm.cp.istfa2002p0003
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SEM / SThM-Hybrid-System: A New Tool for Advanced Thermal Analysis of Electronic Devices

Abstract: A resistive probe based Scanning Thermal Microscope (SThM) was implemented in an analysis chamber of a Scanning Electron Microscope (SEM). By means of this hybrid-system thermal device, specific characteristics are detectable. Variable punctual heat sources can be simulated and the influence of ambient parameters can be investigated.

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Cited by 2 publications
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“…This thermal equivalent circuit is depicted in figure 2, whereas the heat source is given by the completely exposed Pt/Rh filament at the apex of the probe. The precondition for this thermal equivalent is the assumption that there are no heat losses to the surrounding air and this neglect has already been legitimized by the investigations in [20,21]. Furthermore, in the electrical sense, this thermal equivalent circuit can be separated into one lead-in and one dissipation part if the heat source, which indeed is given by the complete length of the platinum filament, is just assumed to be a small part at the very end of the loop-shaped wire.…”
Section: Thermal Equivalent Circuit Of Used Probementioning
confidence: 99%
“…This thermal equivalent circuit is depicted in figure 2, whereas the heat source is given by the completely exposed Pt/Rh filament at the apex of the probe. The precondition for this thermal equivalent is the assumption that there are no heat losses to the surrounding air and this neglect has already been legitimized by the investigations in [20,21]. Furthermore, in the electrical sense, this thermal equivalent circuit can be separated into one lead-in and one dissipation part if the heat source, which indeed is given by the complete length of the platinum filament, is just assumed to be a small part at the very end of the loop-shaped wire.…”
Section: Thermal Equivalent Circuit Of Used Probementioning
confidence: 99%