2016
DOI: 10.1007/s12541-016-0104-y
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Semi-active reaction force compensation for a linear motor motion stage

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Cited by 8 publications
(3 citation statements)
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“…A passive, Active and semi-active RFCs (reaction force compensation) to reduce the system vibration have been studied only for a linear motor motion stage [8][9][10][11]. Although the passive RFC mechanism is compact and costeffective, the passive RFC does not allow in situ modification of the dynamic characteristic of the RFC system.…”
Section: Introductionmentioning
confidence: 99%
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“…A passive, Active and semi-active RFCs (reaction force compensation) to reduce the system vibration have been studied only for a linear motor motion stage [8][9][10][11]. Although the passive RFC mechanism is compact and costeffective, the passive RFC does not allow in situ modification of the dynamic characteristic of the RFC system.…”
Section: Introductionmentioning
confidence: 99%
“…An active RFC mechanism using an additional coil can tune its dynamic characteristic and minimize the transmitted force against the motion profile variation [9]. In addition, a semiactive RFC can modify the damping of the RFC by adjusting the external resistor or open-close time ratio of an additional coil [9][10][11].…”
Section: Introductionmentioning
confidence: 99%
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