2015
DOI: 10.1007/s11706-015-0279-7
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Semiconductor metal oxide compounds based gas sensors: A literature review

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Cited by 116 publications
(53 citation statements)
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“…Metal oxides such as ZnO, SnO 2 , TiO 2 , In 2 O 3 , WO 3 , Fe 2 O 3 , and MoO 3 have been investigated for a long time in the development of conductometric gas sensors [43]. Their low cost, easy production, chemical stability, and suitable electrical properties played a key role in the commercialization of MOX devices, in particular those based on SnO 2 and ZnO in the past fifty years [14].…”
Section: Thin 2d Metal Oxidesmentioning
confidence: 99%
“…Metal oxides such as ZnO, SnO 2 , TiO 2 , In 2 O 3 , WO 3 , Fe 2 O 3 , and MoO 3 have been investigated for a long time in the development of conductometric gas sensors [43]. Their low cost, easy production, chemical stability, and suitable electrical properties played a key role in the commercialization of MOX devices, in particular those based on SnO 2 and ZnO in the past fifty years [14].…”
Section: Thin 2d Metal Oxidesmentioning
confidence: 99%
“…Compared with other types of sensors, chemiresistive gas sensors have been extensively studied because of their remarkable advantages including low cost, simple fabrication, high response, and easy integration with electronic circuits. To ensure high response and reversible operation of chemiresistive gas sensors, high operating temperatures of 150–400 °C are inevitably required for adsorption and desorption of target molecules on and off of the sensing materials . However, this high temperature degrades the sensor stability and lifetime due to thermally induced grain growth, which can damage interconnected electronics .…”
Section: Introductionmentioning
confidence: 99%
“…The increased demand for highly sensitive, selective, cheap, low-power, reliable, stable, and portable sensors has stimulated extensive research to develop new sensing materials. Semiconducting metal oxides have long been considered promising candidates for gas-sensing applications because of their high sensitivity, easy fabrication methods, low cost, and high compatibility with other parts and processes [2][3][4]. Different types of metal oxide such as ZnO, SnO 2 , TiO 2 , In 2 O 3 , WO 3 , TeO 2 , CuO, CdO, Fe 2 O 3 , and MoO 3 have been developed and employed in the fabrication of gas sensors and it was found that chemical components, surface state, morphology, and microstructure play important roles in gas-sensing performance [5].…”
Section: Introductionmentioning
confidence: 99%