Abstract-Power semiconductors operate at different loads with different repetitive frequencies depending on each application. The resultant power loss of a semiconductor can be dissipated as a heat flow or absorbed. In this paper, the thermal path is described frequency-dependent by the power loss input to the thermal mass.The thermal path is defined through the packaging and described by a Cauer model. It consists of thermal resistors and capacitors which depend on the material and which can be realized through a continuous fraction element for each layer. This arrangement causes a frequency dependency of the transmission behavior of the package, which is shown in this paper by using the Bode diagram. Two different systems are described; a diode and a DBC module. The frequency-dependent description using the Bode diagram makes it possible to calculate the energy input into individual layers. Thereby the load of the layer is determined as a function of the amplitude and frequency of the input power. The frequency analysis of the input signal in combination with the material-dependent Cauer model allows prediction of the critical layers.Index Terms-Power semiconductor, thermal energy inputs, description of the thermal path, frequency-dependent layer composite, Bode diagram.