Sensing Characteristics of Ruthenium Films Fabricated by Radio Frequency Sputtering

Abstract

The use of Fourier analysis in nuclear medicine gated blood pool ventriculography provides a useful example of the application of Fourier methods to digital medical imaging. In particular, the nuclear medicine experience demonstrates that there is diagnostic significance not only in the pixel averages of temporal Fourier magnitude and phase computed in various image regions, but also in the distributions of the individual pixel values about those averages. However, a region containing pixels that are perfectly synchronous on average would still yield a finite distribution of calculated Fourer coefficients due to the propagation of stochastic pixel noise into the calculated values. We have studied this noise component of both the magnitude and phase distributions using phantom studies and computer simulation. In both approaches, several thousand one-pixel 'ventriculograms' were generated, all identical to each other except for stochastic noise. Fourier magnitudes and phases at several frequencies were calculated and histograms generated. A theoretical prediction of the distributions was developed and shown to fit the experimental results well. Our formalism can be used to estimate study count requirements or, for fixed study counts, to assess the stochastic noise contribution in the interpretation of measured phase and magnitude distributions.

Temperature effects on the performance of RuO2 thin-film pH sensor

“…Therefore, pH values of 4, 7 and 10 were selected. However, Chou et al [15] have tested ruthenium oxide pH sensing membranes in standard buffer solutions of pH 1-12 at room temperature, demonstrating a linear potential-pH response with a pH sensitivity of 55.52 mV/pH. However, for a highly basic solution of pH 13, the ruthenium oxide sensing membrane exhibited signs of corrosion.…”

“…Pourbaix Atlas has been used, particularly, for explaining the mechanism governing redox equilibrium between two insoluble ruthenium oxides, which is governed by the following reaction [20][21].…”

Recent Developments in R.F. Magnetron Sputtered Thin Films for pH Sensing Applications—An Overview

“…The hysteresis widths of the RuO2 ISE device were 4.36 mV and 2.2 mV in pH 7-4-7-10-7 and pH 7-10-7-4-7 loop cycles, respectively. J. Chou et al [23] have investigated reactively sputtered ruthenium oxide (RuOx) and ruthenium nitride (RuN) sensing membrane deposited on silicon substrate for pH sensing applications. The RuOx film was prepared in an Ar/O2 process gas ratio of 40 sccm/15 sccm at an R.F.…”

“…In recent years, a number of metal oxides based pH sensors have been developed incorporating IrO2 [16][17][18][19], RuO2 [20][21][22][23][24], PtO2 [25], SnO2 [25], TaO2 [25], TiO2 [25,26] and Ta2O5 [27,28]. pH sensors have been developed using a variety of deposition techniques including magnetron sputtering [20][21][22], sol-gel [17,29], screen-printing [24,30] and plasma enhanced chemical vapour deposition (PECVD) [31,32] and electroplating [33][34][35].…”

Weighted Data Fusion Use for Ruthenium Dioxide Thin Film pH Array Electrodes

“…Ruthenium dioxide thin films are also used to fabricate biosensors [15], supercapacitors [16]- [19], temperature sensor [20], batteries and fuel cells [21], [22] and pyroelectric devices [23]. Many different methods have been used to prepare ruthenium dioxide, such as screen-printing [13], [14], chemical vapor deposition (CVD) [24], [25], sputtering [11], [26], [27], atomic vapor deposition (AVD) [28], and sol-gel [29]. Ruthenium dioxide thin films were prepared using a sputtering method in this study.…”