2008 IEEE-EPEP Electrical Performance of Electronic Packaging 2008
DOI: 10.1109/epep.2008.4675916
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Sensitivity computation of interconnect capacitances with respect to geometric parameters

Abstract: This paper presents an algorithm that enables an extension of standard 3d capacitance extraction to take into account the effects of small dimensional variations of interconnects by calculating the corresponding capacitance sensitivities. By using an adjoint technique, capacitances and their sensitivities w.r.t. multiple geometric parameters can be obtained with one-time 3d extraction using the Boundary Element Method (BEM).

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Cited by 17 publications
(9 citation statements)
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References 6 publications
(11 reference statements)
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“…Novel extraction methodologies can efficiently generate such sensitivity information [5,26]. A nice feature of this representation is that this explicit parameter dependence allows to obtain a reduced, yet similar representation when a projection scheme is applied Some questions may be raised about the order neccessary for an accurate representation of the parametric model.…”
Section: Representation Of Parametric Systemsmentioning
confidence: 99%
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“…Novel extraction methodologies can efficiently generate such sensitivity information [5,26]. A nice feature of this representation is that this explicit parameter dependence allows to obtain a reduced, yet similar representation when a projection scheme is applied Some questions may be raised about the order neccessary for an accurate representation of the parametric model.…”
Section: Representation Of Parametric Systemsmentioning
confidence: 99%
“…The nominal value chosen was p 3 = 3µm and samples in the interval [1,5]µm were considered. The reference result was obtained by simulated the samples separately (each sample was discretized and solved).…”
Section: Parametric Modelsmentioning
confidence: 99%
“…The width and thickness of interconnect wire are often set to be random variables. This model was employed for sensitivity calculation [7,8], and for statistical extraction of 2-D cross-section structure in [9]. Among the three models, the VAW model is the simplest one, which does not consider the detailed fluctuation of surface panels.…”
Section: A Existing Geometric Variation Modelsmentioning
confidence: 99%
“…Step 4, the values of derived variables are calculated with interpolation as that in (8). In Step 6, the statistical expression of capacitance is firstly calculated [6], and then the values of mean and Std, or the PDF can be obtained.…”
Section: A Implementation Detailsmentioning
confidence: 99%
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