Sensitivity enhancement of a silicon micro-machined thermal flow sensor

Roh, Sung-Cheoul; Choi, Yong Moon; Kim, Soo-Yong

doi:10.1016/j.sna.2005.05.007

Cited by 41 publications

(18 citation statements)

References 12 publications

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“…Although differential temperature flow sensors have been widely investigated [1][2][3][4][5][6], very few works have been devoted to find the impact of the sensor structure and dimensions on the key figures of merit of the devices [14][15][16][17][18][19][20]. Fluid dynamic simulations provide useful indications on particular aspects of the sensor operation, but are unable to embrace the whole transduction process, involving different physical domains that altogether contribute to the sensor performance.…”

Section: Open Accessmentioning

confidence: 99%

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although several critical issues have still to be solved. In this work, a systematic approach to the design of integrated thermal flow sensors, with specification of resolution, dynamic range, power consumption and pressure insertion loss is proposed. All the critical components of the sensors, namely thermal microstructure, package and read-out interface are examined, showing their impact on the sensor performance and indicating effective optimization strategies. The proposed design procedures are supported by experiments performed using a recently developed test chip, including several different sensing structures and a flexible electronic interface.

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Section: Open Accessmentioning

confidence: 99%

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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“…A large value for R s (i.e., small Q s ) is necessary for the sensor to function. 7 As shown in Fig. 2(a), when R s is large, Q f is much larger than Q s , the rst term of the denominator in eqn (3) is much smaller than the second term, and DT is dominated by convective heat transfer.…”

Section: Resultsmentioning

confidence: 93%

Low-power micro-fabricated liquid flow-rate sensor

Lin

Burns

2015

Anal. Methods

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“…One characteristic of temperature difference air flow sensor is that the sensor can measure the mass flow rate of gas directly which bring about advantages on accuracy of measurement, response time and reliability, compared with traditional volumetric air flow sensor [1]. The active part of temperature difference air flow sensor consists of a heater, an environment temperature measuring thermistor and a pair of temperature measuring thermistors which lie in the upstream and downstream of the heater along the gas flow direction symmetrically.…”

Section: Introductionmentioning

confidence: 99%

Modeling and simulation of self-heating effect with temperature difference air flow sensor

Guo

Jiang

et al. 2014

2014 15th International Conference on Electronic Packaging Technology

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The paper presents an analysis of self-heating effect on micro-machined temperature difference air flow sensor, and demonstrates through modeling and simulation that self-heating effect can influence the output of the air flow sensor. The mathematical model of the sensor based on an existing microsensor chip is set up, and some details of the chip structure are considered in the model. The sensor's temperature distribution with respect to the flow rate is computed by coupling heat transfer interaction between the fluid and sensor's structure using ANSYS Fluent. The self-heating effects of the two temperature measuring thermistors are studied respectively in order to analyze their influences on the temperature difference compared with results obtained by ignoring the self-heating effect over the flow rate range between 0 and 15m/s. The change of temperature difference between the two thermistors by applying the same or different self-heating power are also studied. According to the simulation results, the conclusion that lower self-heating power and lower the self-heating power difference between the two thermistors helps to reduce the impact of selfheating effects on the sensor's output is made.

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Sensitivity enhancement of a silicon micro-machined thermal flow sensor

Cited by 41 publications

References 12 publications

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Low-power micro-fabricated liquid flow-rate sensor

Modeling and simulation of self-heating effect with temperature difference air flow sensor

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