2018
DOI: 10.26866/jees.2018.18.1.35
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Sensitivity Enhancement of a Vertical-Type CMOS Hall Device for a Magnetic Sensor

Abstract: This study presents a vertical-type CMOS Hall device with improved sensitivity to detect a 3D magnetic field in various types of sensors or communication devices. To improve sensitivity, trenches are implanted next to the current input terminal, so that the Hall current becomes maximum. The effect of the dimension and location of trenches on sensitivity is simulated in the COMSOL simulator. A verticaltype Hall device with a width of 16 μm and a height of 2 μm is optimized for maximum sensitivity. The simulatio… Show more

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Cited by 10 publications
(6 citation statements)
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“…For a VHD, the magnetic field is applied in the horizontal direction to P-substrate as in Figure 3 b, and the Hall signal is formed in current type (I HALL ). Due to the short circuit effect, the sensitivity of VHDs is usually lower than that of HHDs [ 5 , 7 ], so an HHD is used in this work to achieve high sensitivity. Many HHD structures are introduced so far, and among them, we use a cross-sectional structure since it is the most optimized one for the sensitivity [ 13 , 14 ].…”
Section: Proposed Hall Sensor Architecturementioning
confidence: 99%
See 1 more Smart Citation
“…For a VHD, the magnetic field is applied in the horizontal direction to P-substrate as in Figure 3 b, and the Hall signal is formed in current type (I HALL ). Due to the short circuit effect, the sensitivity of VHDs is usually lower than that of HHDs [ 5 , 7 ], so an HHD is used in this work to achieve high sensitivity. Many HHD structures are introduced so far, and among them, we use a cross-sectional structure since it is the most optimized one for the sensitivity [ 13 , 14 ].…”
Section: Proposed Hall Sensor Architecturementioning
confidence: 99%
“…Commercial CMOS processes do not give designers the freedom to choose materials, so instead, sensitivity is generally enhanced by modifying the Hall device shape. Various Hall device structures such as four contact (4F) or multiple-terminal ones [ 5 , 6 , 7 ] have been attempted, but the improvement is not significant due to limitation on the material used. Therefore, the amplification process in a Hall sensor is essential to achieve a high signal-to-noise ratio (SNR), and a low-noise operational amplifier (op-amp) is very often used in the system.…”
Section: Introductionmentioning
confidence: 99%
“…The conventional loop [23][24][25][26][27] or helical/helix shaped [28][29][30] antennas used as magnetic field antennas cannot produce the required high magnetic field intensity with the constraint of the low input feed power for the near-field magnetic field testing as per the NFIT setup of Figure 2. The embedding of high permeability materials such as ferrites in the antenna structure (sandwiching between the antenna radiator and ground plane as in [31,32]) could enhance the intensity of the generated magnetic field by the antenna.…”
Section: Design and Simulationmentioning
confidence: 99%
“…Nanoparticle arrays are now patterned more and more precisely with various methods, such as sub-micron sphere self-assembly lithography techniques [1][2][3][4][5], selective ion irradiation [6][7][8][9] and film growth technologies [10,11]. Ferromagnetic nanomaterials are of special interest due to their potential application in magnetic data storage and spintronic devices, such as MRAM, microwave oscillators, magnetic nanosensors [12][13][14][15][16][17][18][19][20][21].…”
Section: Introductionmentioning
confidence: 99%