2002
DOI: 10.1109/tns.2002.805395
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SEU sensitivity of bulk and SOI technologies to 14-MeV neutrons

Abstract: This work investigates the effects of 14-MeV neutron irradiation on bulk and silicon-on-insulator (SOI) technologies. Experimental results are reported with a study on the influence of the irradiation angle. These experiments are interpreted with a nuclear interaction code (MCNP: Monte Carlo N-Particle). The device architecture and the involved materials are shown to be determining parameters with respect to the device sensitivity.

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Cited by 41 publications
(13 citation statements)
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“…The minimum cross section is obtained for back side irradiation with a decrease between 40% and 85% compared to the cross section at normal incidence. The difference between the front and the back side cross section is explained by the effect of the thick oxide layers (passivation layer) that contribute to the increase of the cross section for normal incidence [8]. Between 30 and 120 , two specific behaviors are observed for memories.…”
Section: B Angle Of Incidencementioning
confidence: 99%
See 1 more Smart Citation
“…The minimum cross section is obtained for back side irradiation with a decrease between 40% and 85% compared to the cross section at normal incidence. The difference between the front and the back side cross section is explained by the effect of the thick oxide layers (passivation layer) that contribute to the increase of the cross section for normal incidence [8]. Between 30 and 120 , two specific behaviors are observed for memories.…”
Section: B Angle Of Incidencementioning
confidence: 99%
“…The neutron energy is equal to 14 MeV with the source location either above or below the structures to simulate front or back side irradiations which corresponds respectively to a beam angle of 0 and 180 with respect to the perpendicular of the device surface. The structure used for MCNP simulation has been previously described [8]. The analysis performed after MCNP calculations uses two parameters which are the dimensions of the sensitive volume SV and the deposited charge in the SV.…”
Section: Simulationmentioning
confidence: 99%
“…The strongest angular dependence is observed at 14 MeV for both bulk and SOI devices [11], [15]. We plotted in Fig.…”
Section: Angular Dependence Of Seu Cross Sectionmentioning
confidence: 92%
“…Previous studies have pointed out the strong effect of the angle of incidence for low energy particles [11], [15], [16]. This behavior is attributed to the presence of other materials (SiO , metal layers) above the sensitive region leading to different recoil LET distribution between front side and back side irradiations.…”
Section: Analysis Of the Sensitivity Of Bulk And Fd-soi Technologmentioning
confidence: 99%
“…For this reason, physical designers are continuously searching for new methods to improve manufacturing technologies to reduce SEE consequences. For instance, Silicon-On-Insulator (SOI) technology has been proved to be less sensitive than CMOS bulk technology [5].…”
Section: Introductionmentioning
confidence: 99%