2003
DOI: 10.1063/1.1591235
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Shape memory effect in nanoindentation of nickel–titanium thin films

Abstract: In this study, a series of nanoindentations was made on NiTi shape memory alloy thin films at millinewton loads with a Berkovich indenter. Mapping of the indentation topography using atomic force microscopy reveals direct evidence that the thermally induced martensitic transformation of these films allows for partial indent recovery on the nanoscale. Indeed, recovery is nearly complete at indentation depths of less than 100 nm. A hemispherical cavity model is presented to predict an upper limit to shape memory… Show more

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Cited by 115 publications
(74 citation statements)
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“…Indentation shape recovery has also been demonstrated on the microscale [5]. Our nanoscale work shows good agreement with the microscale data, and also extends the measurements to thin film materials [6] as well as different kinds of deformation (nanoscratch and nanowear) [7]. It also indicates that shape recovery increases markedly at indentation depths less than 100nm.…”
Section: Introductionsupporting
confidence: 74%
See 1 more Smart Citation
“…Indentation shape recovery has also been demonstrated on the microscale [5]. Our nanoscale work shows good agreement with the microscale data, and also extends the measurements to thin film materials [6] as well as different kinds of deformation (nanoscratch and nanowear) [7]. It also indicates that shape recovery increases markedly at indentation depths less than 100nm.…”
Section: Introductionsupporting
confidence: 74%
“…According to our model [6], the radius of the region which deforms through shape memory processes, c mr , can be estimated as a function of indent depth using E = 60 GPa [10] and Y = 0.2 GPa (the critical stress for martensite twin reorientation). Likewise, c pl can be estimated using a maximum value of 0.8 GPa for Y [1].…”
Section: Q7113mentioning
confidence: 99%
“…During nanoindentation experiments, the low loads and small displacements are measured continuously, and typical load-displacement curves are recorded. Recent studies on the nanoindentation behavior of NiTi focused on characterizing the mechanical properties and transformation behavior by analyzing load-displacement data [610] and/or the residual surface features after indentation [10][11][12][13][14][15]. A widely used technique to quantify the amount of pseudoelastic recovery during nanoindentation testing is calculating the ratio of the remnant displacement h rem and the maximum displacement h max from load-displacement curves [6,16,17]: (1) Pseudoelastic recovery is characterized by low values of the remnant displacement ratio (RDR), whereas large RDR-values are associated with a more pronounced effect of plastic deformation.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6] NiTibased shape memory films have been considered as one of the most promising candidates due to their high power output per volume, large actuation strain and high damping capacity. 7 For many micro-actuators, a narrow hysteresis is essential to improve the efficiency of actuation, whereas for energy storage devices a wide hysteresis is required.…”
mentioning
confidence: 99%