Shape, size, and atomic composition analysis of nanostructures in 3D by Rutherford backscattering spectrometry

Zolnai, Zsolt

doi:10.1016/j.apsusc.2013.04.081

Cited by 9 publications

(7 citation statements)

References 25 publications

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“…Specific codes such as MAST [7][8][9][10][11], PowerMeis [12,13], and others [14] exist that can handle 3D samples, including simulation of the spectra expected from user-input structures. These codes usually calculate spectra for all possible trajectories of the analysing ions in the 3D sample, and produce an average that can be directly compared to the experimental data.…”

Section: Introductionmentioning

confidence: 99%

Analytical simulation of RBS spectra of nanowire samples

Barradas

García-Núñez

Redondo-Cubero

et al. 2016

Nuclear Instruments and Methods in Physics Research Section B:

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Section: Introductionmentioning

confidence: 99%

Analytical simulation of RBS spectra of nanowire samples

Barradas

García-Núñez

Redondo-Cubero

et al. 2016

Nuclear Instruments and Methods in Physics Research Section B:

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“…To increase the accuracy of evaluation, spectra were also recorded at tilt angles of  = 45 o and  = 70 o for He + -RBS and p-EBS analysis, respectively. In the latter case the peak intensity for Be can be increased by a factor of 2.9 according to 1/cos() [16].…”

Section: Methodsmentioning

confidence: 99%

“…IBA allows accurate measurements of concentrations of constituents and the stoichiometry of thin films as a function of depth. Also, its capability in determining the shape and the size of nanostructures has been demonstrated [15,16]. Recently an assertion of 1% absolute accuracy for Rutherford Backscattering Spectrometry (RBS) -the simplest IBA method -has been validated on the basis of the uncertainty budget [17].…”

Section: Introductionmentioning

confidence: 99%

“…Although the concept of monitoring Be with this reaction was proposed and applied for BeZnO [22], actually there has been no experimental demonstration with a detailed analysis of the measured backscattering spectra. Note that the resonance-enhanced non-Rutherford cross-sections for the nat Mg(p,p) nat Mg and 16 O(p,p) 16 O elastic backscattering reactions also have to be considered in such spectrum evaluation procedures for BeMgZnO alloys.…”

Section: Introductionmentioning

confidence: 99%

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Nondestructive atomic compositional analysis of BeMgZnO quaternary alloys using ion beam analytical techniques

Zolnai

Toporkov

Volk

et al. 2015

Applied Surface Science

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HighlightsBeMgZnO thin layers were grown with plasma assisted molecular beam epitaxy (MBE)The Be contents were accurately measured with RBS and proton elastic backscattering The Tauc bandgap was measured from optical transmittance experiments The bandgap has been varied between 3.26 eV and 4.62 eV via the Be and Mg content Experimental and density functional theory calculated bandgaps were in good agreement AbstractThe atomic composition with less than 1-2 atom % uncertainty was measured in ternary BeZnO and quaternary BeMgZnO alloys using a combination of nondestructive Rutherford backscattering spectrometry with 1 MeV He + analyzing ion beam and nonRutherford elastic backscattering experiments with 2.53 MeV energy protons. An enhancement factor of 60 in the cross-section of Be for protons has been achieved to monitor Be atomic concentrations. Usually the quantitative analysis of BeZnO and BeMgZnO systems is challenging due to difficulties with appropriate experimental tools for the detection of the light Be element with satisfactory accuracy. As it is shown, our applied ion beam technique, Page 2 of 22A c c e p t e d M a n u s c r i p t supported with the detailed simulation of ion stopping, backscattering, and detection processes allows of quantitative depth profiling and compositional analysis of wurtzite BeZnO/ZnO/sapphire and BeMgZnO/ZnO/sapphire layer structures with low uncertainty for both Be and Mg. In addition, the excitonic bandgaps of the layers were deduced from optical transmittance measurements. To augment the measured compositions and bandgaps of BeO and MgO co-alloyed ZnO layers, hybrid density functional bandgap calculations were performed with varying the Be and Mg contents. The theoretical vs. experimental bandgaps show linear correlation in the entire bandgap range studied from 3.26 eV to 4.62 eV. The analytical method employed should help facilitate bandgap engineering for potential applications, such as solar blind UV photodetectors and heterostructures for UV emitters and intersubband devices.

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“…In order to develop efficient BPM devices, there is strong demand for nanosystems with ordered structure. Several methods, like electrodeposition 15 , etching 16 , self assembly [17][18][19][20][21] , electron-beam lithography 22,23 and others [24][25][26] are known for producing highly ordered nanostructures. Self-assembled spherical nanoparticles prepared by Langmuir-Blodgett technique 27,28 are great candidates for future BPM devices due to their cost effective and large scale preparation.…”

Section: Introductionmentioning

confidence: 99%

Evolution of magnetism on a curved nano-surface

et al. 2015

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To design custom magnetic nanostructures, it is indispensable to acquire precise knowledge about the systems in the nanoscale range where the magnetism forms. In this paper we present the effect of a curved surface on the evolution of magnetism in ultrathin iron films. Nominally 70 Å thick iron film was deposited in 9 steps on 3 different types of templates: a) A monolayer of silica spheres with 25 nm diameter b) a monolayer of silica spheres with 400 nm diameter and for comparison a flat silicon substrate. The in-situ iron evaporation took place in an ultrahigh vacuum chamber using molecular beam epitaxy technique. After the evaporation steps, time differential nuclear forward scattering spectra, grazing incidence small angle X-ray scattering images and X-ray reflectivity curves were recorded. In order to reconstruct and visualize the magnetic moment configuration in the iron cap formed on top of the silica spheres, micromagnetic simulations were performed for all iron thicknesses. We found a great influence of the template topography on the onset of the magnetism and on the developed magnetic nanostructure. We observed individual magnetic behaviour for the 400 nm spheres which was modelled by vortex formation and collective magnetic structure for the 25 nm spheres where magnetic domains spread over several particles. Depth selective nuclear forward scattering measurements showed that the formation of magnetism begins at the top region of the 400 nm spheres contrary to the 25 nm particles were the magnetism first appears in the region where the spheres are in contact with each other.

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Shape, size, and atomic composition analysis of nanostructures in 3D by Rutherford backscattering spectrometry

Cited by 9 publications

References 25 publications

Analytical simulation of RBS spectra of nanowire samples

Analytical simulation of RBS spectra of nanowire samples

Nondestructive atomic compositional analysis of BeMgZnO quaternary alloys using ion beam analytical techniques

Evolution of magnetism on a curved nano-surface

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