2011
DOI: 10.1088/0256-307x/28/12/125201
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Sheath Criterion for a Collisional Electronegative Plasma Sheath in an Applied Magnetic Field

Abstract: The sheath criterion for a collisional electronegative plasma sheath in an applied magnetic field is investigated. It is assumed that the system consists of hot electrons, hot negative ions and cold positive ions. The effect of an applied magnetic field on the sheath criterion is discussed. The results reveal that the magnetic field has effects on both the upper and lower limits, which cause the range of the ion Mach number to increase. In addition, the numerical calculations of the electronegative plasma shea… Show more

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Cited by 9 publications
(6 citation statements)
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“…The structure of the plasma sheath plays an important role in many processes such as plasma etching and material surface modification. Therefore, relevant theoretical and experimental research works are still a special topic of interest [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. These works have studied many plasma sheath layers with different physical conditions, such as the collision between ions and neutral particles, ion temperature and applied magnetic field.…”
Section: Introductionmentioning
confidence: 99%
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“…The structure of the plasma sheath plays an important role in many processes such as plasma etching and material surface modification. Therefore, relevant theoretical and experimental research works are still a special topic of interest [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. These works have studied many plasma sheath layers with different physical conditions, such as the collision between ions and neutral particles, ion temperature and applied magnetic field.…”
Section: Introductionmentioning
confidence: 99%
“…In these research works, it is assumed that both the electron and negative ion satisfy the Boltzmann distribution at low pressure [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. In 2009, Ghim and Hershkowitz [4] proved that the negative ions follow the Boltzmann distribution through experiments.…”
Section: Introductionmentioning
confidence: 99%
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“…Plasmas with a significant amount of negative ions whose contribution cannot be neglected in any way, are known as electronegative plasmas (ENPs). [1][2][3][4][5][6][7] ENPs have attracted a great deal of attention not only because of their potential applications in microelectronic and photoelectronic industries [8] but also because of their occurrence in both laboratory devices, [9][10][11] and space environments. [12][13][14] The ENPs observed in both space and laboratory devices, are not pure in general.…”
Section: Introductionmentioning
confidence: 99%
“…For example, Wang et al 12 investigated sheath structure in a collisionless electronegative plasma consisting of electrons, cold positive ions and hot negative ions. Also, the sheath criterion for a magnetized collisional electronegative plasma consists of hot electrons, hot negative ions and cold positive ions was investigated by Zou et al 13 . Furthermore, considering the thermal effect of positive ions, the generalized Bohm criterion for a collisonless two-component electron-ion plasma was formulated by Dubinov and Senilov 14 .…”
mentioning
confidence: 99%