Sheet-shaped plasma produced by electron cyclotron resonance heating

Abstract

A new production technique of sheet-shaped plasma by means of electron cyclotron resonance heating (ECRH) is proposed. The sheet plasma is produced in a vessel with rectangular cross section set in a rectangular magnetic field coil. The maximum density and electron temperature of the sheet plasma are about 2.6×1011 cm−3 and 7 eV, respectively, in a typical argon gas pressure of P0=5×10−4 Torr. The sheet plasma has several peaks of the density profile across the plasma width. These modes appear according to the change of working gas pressure. Those parameters including plasma density, density profile, and ion energy are controllable. This plasma is expected to be useful for material processing or plasma-based high-energy particle accelerators.

Characteristics of an ECR Sheet-Shaped Plasma Formed by a Combination of Permanent Magnets and Field Coils

“…The so called Uramoto-type sheet plasma device employs one of the simplest design to realize a sheet-shaped plasma by combining a linear magnetic field produced by electromagnets and a pair of dipole permanent magnets [4]. Because of the performance to create a thin plasma, the configuration was utilized among several research groups [5][6][7].…”

Application of sheet shaped plasma supplemented with radio frequency plasma source for production of thin films

“…15,16 Furthermore, we added a small volume radio frequency ͑rf͒ plasma source for precisely controlling the plasma parameters. Furthermore, it is shown that the spatial profile of the plasma has sharp gradient with high density and temperature in source area but low temperature with rather high density in outer region.…”