A simple
method was developed for fabricating current-drivable
light-emitting organic structures with lateral sizes on the nanometer
scale. Appropriate synthesis conditions for organic electron-beam
(EB) resist copolymers of ZEP520A containing 8-hydroxyquinoline aluminum
(Alq3) were determined for the structures. Square layer
structures with side lengths of less than 1 μm were fabricated
using this composite resist simply by EB exposure and development.
Green electroluminescence attributed to the emission from Alq3 was observed from the devices with the composite resist.
This method opens the door to the development of organic quantum-information
devices, near-field optical microscopy, nanoscale photopatterning,
high-resolution light-emitting diodes, and highly sensitive biosensors.