SiC-FET methanol sensors for process control and leakage detection

Darmastuti, Zhafira; Bhattacharyya, P.; Andersson, Mike; Kanungo, J.; Basu, Srinka; Käll, Per-Olov; Ojamäe, Lars; Spetz, Anita Lloyd

doi:10.1016/j.snb.2013.04.019

Cited by 8 publications

(3 citation statements)

References 24 publications

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“…2 Several reports have so far been published on methanol sensing properties of different metal oxides, employing various nanoforms. [3][4][5][6][7][8][9][10][11][12][13][14] However, very few have focused on the selective detection of methanol vapor against the interfering species (i.e. ethanol, 2-propanol, acetone etc.).…”

Section: Introductionmentioning

confidence: 99%

“…[12][13][14] A scrutiny of contemporary literature reveals that methanol sensitivity as well as selectivity of different semiconducting metal oxides has been improved by adopting the following measures: (i) incorporation of partially filled d-shell metal as a dopant or a surface modifier to semiconducting oxides, 4 (ii) use of the composite structure of different metal oxides, 4 (iii) use of an organic or inorganic membrane to selectively allow the special target molecules towards the metal oxide surface, 5 (iv) depositing noble metal as a gate material for the chemical field effect transistor (Chem-FET) sensor (e.g. Pt gate SiC-FET sensor) 6 and (v) developing a sensor array combined with appropriate pattern reorganization tools tuned for favourable target species (e.g. surface acoustic wave (SAW) sensor).…”

Section: Introductionmentioning

confidence: 99%

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Hybrid 3D structures of ZnO nanoflowers and PdO nanoparticles as a highly selective methanol sensor

Acharyya

Huang

Chattopadhyay

et al. 2016

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The present study concerns the enhancement of methanol selectivity of three dimensional (3D) nanoflowers (NFs) of ZnO by dispersing nickel oxide (NiO) and palladium oxide (PdO) nanoparticles on the surface of the nanoflowers to form localized hybrid nano-junctions. The nanoflowers were fabricated through a liquid phase deposition technique and the modification was achieved by addition of NiCl and PdCl2 solutions. In addition to the detailed structural (like X-ray diffraction (XRD), electron dispersive spectroscopy (EDS), X-ray mapping, XPS) and morphological characterization (by field emission scanning electron microscopy (FESEM)), the existence of different defect states (viz. oxygen vacancy) was also confirmed by photoluminescence (PL) spectroscopy. The sensing properties of the pristine and metal oxide nanoparticle (NiO/PdO)-ZnO NF hybrid sensor structures, towards different alcohol vapors (methanol, ethanol, 2-propanol) were investigated in the concentration range of 0.5-700 ppm at 100-350 °C. Methanol selectivity study against other interfering species, viz. ethanol, 2-propanol, acetone, benzene, xylene and toluene was also investigated. It was found that the PdO-ZnO NF hybrid system offered enhanced selectivity towards methanol at low temperature (150 °C) compared to the NiO-ZnO NF and pristine ZnO NF counterparts. The underlying mechanism for such improvement has been discussed with respective energy band diagram and preferential dissociation of target species on such 3D hybrid structures. The corresponding improvement in transient characteristics has also been co-related with the proposed model.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Hybrid 3D structures of ZnO nanoflowers and PdO nanoparticles as a highly selective methanol sensor

Acharyya

Huang

Chattopadhyay

et al. 2016

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“…It was also observed that with both gate materials for low methanol concentration, adding oxygen to the carrier gas improved the sensor sensitivity by 20% and also reduced the response/recovery time by 50%. 121 Gallium nitrate gas sensor (GaN).-Wide band gap with small activation energy is the key design parameter for the semiconductor gas sensors which void the surrounding temperature influence on the device degradation. Both SiC and GaN serves as a material to design a sensor for extreme harsh environment due to its high chemical stability and high melting point.…”

Section: Wideband Semiconductor Gas Sensormentioning

confidence: 99%

Review—Semiconductor Materials and Devices for Gas Sensors

Raju¹,

Li²

2022

J. Electrochem. Soc.

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Gas sensors are frequently used for detecting toxic gases and vapors for environmental control, industrial monitoring, and household safety. Semiconductor conductivity can be modified by doping or fine-tuned by applying an electric or magnetic field in an ultra-wide range (10-7 S/cm to 102 S/cm). The conduction of semiconductor is significantly raised or reduced upon the exposure to external conditions, such as temperature variation, light, heat, mechanical stress, or chemicals. Thus, semiconductors are excellent materials for sensors and the device structures are critical for sensing performance. The commonly used semiconductors materials include Si, Ge, III-V, and metal oxide semiconductors. Recently carbon-based materials gain signification attention due to their unique electrical, optical and mechanical properties. There are two major semiconductor gas sensors: resistor-based and FET-based sensors. In this review, the semiconductor materials, sensor device structure as well as gas sensing mechanisms will be systematically categorized, described and explored, with the focus on metal oxides, GaN, SiC, 2D-TMD and carbon-based gas sensors. The recent progress in new semiconductor gas sensors will be thoroughly reviewed and summarized, with a hope to show the trend in semiconductor gas sensor technology.

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The Sulfur Dioxide (SO2) Detection by O Functionalized Carbon and Silicon Nanocones: A Theoretical Study

Najafi

2016

J Clust Sci

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SiC-FET methanol sensors for process control and leakage detection

Cited by 8 publications

References 24 publications

Hybrid 3D structures of ZnO nanoflowers and PdO nanoparticles as a highly selective methanol sensor

Hybrid 3D structures of ZnO nanoflowers and PdO nanoparticles as a highly selective methanol sensor

Review—Semiconductor Materials and Devices for Gas Sensors

The Sulfur Dioxide (SO2) Detection by O Functionalized Carbon and Silicon Nanocones: A Theoretical Study

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