2021
DOI: 10.1109/ted.2021.3117535
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Side-Illuminated Photoconductive Semiconductor Switch Based on High Purity Semi-Insulating 4H-SiC

Abstract: High purity semi-insulating (HPSI) 4H-silicon carbide (SiC) was used to fabricate lateral and vertical photoconductive semiconductor switches (PCSSs). The lateral PCSSs were illuminated from the frontside (fPCSS) or the backside (bPCSS). The side-illuminated vertical PCSS (vPCSS) was designed to increase the light-matter interaction volume. A 532-nm pulsed laser with adjustable energy was utilized to excite the PCSSs. The turn-on time was found to be highly dependent on the optical illumination energy, and the… Show more

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Cited by 12 publications
(6 citation statements)
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“…However, these devices did not use the C-doped layer that is central to the present high-speed operation. However, progress on the device fabrication side is being made [53,54]. Hence, it is likely that a true high-speed pulse compression GaN PCSS may be realized in the near future that is capable of operating in the 100 GHz regime as predicted here for a rugged and robust advanced high power PCSS alternative.…”
Section: Discussionmentioning
confidence: 89%
“…However, these devices did not use the C-doped layer that is central to the present high-speed operation. However, progress on the device fabrication side is being made [53,54]. Hence, it is likely that a true high-speed pulse compression GaN PCSS may be realized in the near future that is capable of operating in the 100 GHz regime as predicted here for a rugged and robust advanced high power PCSS alternative.…”
Section: Discussionmentioning
confidence: 89%
“…1(a), 8-mm-diameter circular electrodes were formed on both sides of the 1.3×1.3 cm 2 substrate by optical lithography, where the photoresist (AZ5214) was utilized for image reversal process and a mask aligner (M100, PRO Win) was used for optical exposure and flood exposure. Subsequently, the multilayer metallization consisting of Ni/Ti/Au (40/40/300 nm) was evaporated and lifted-off [22]. As shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…In this work, a side-illuminated vertical PCSS based on HPSI 4H-SiC was fabricated to investigate current switching capability. The side-illuminated vertical PCSS device exhibited high optical absorption efficiency so that a low onstate resistance can be achieved at low optical excitation energy [22]. A 532-nm laser was utilized for the optical coupling of the entire volume of the vertical PCSS.…”
Section: Introductionmentioning
confidence: 99%
“…As one can see, defects can deteriorate the device characteristics in many ways [91,117]. Although the negative effects of defects can be counteracted by designing different device structures [1][2][3][118][119][120][121][122][123], establishing a fast and accurate defect inspection system is amid a pressing need to help one observe defects and further optimize the process to reduce them. Note that analyzing the characteristics of SiC devices to identify type and the presence of defects could potentially be used as a defect inspection method (Figs.…”
Section: Impact Of Defects On Devicesmentioning
confidence: 99%