2021
DOI: 10.3390/chemosensors9020032
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Silica Layer Used in Sensor Fabrication from a Low-Temperature Silane-Free Procedure

Abstract: Silica (SiO2, silicon dioxide—a dielectric layer commonly used in electronic devices) is widely used in many types of sensors, such as gas, molecular, and biogenic polyamines. To form silica films, core shell or an encapsulated layer, silane has been used as a precursor in recent decades. However, there are many hazards caused by using silane, such as its being extremely flammable, the explosive air, and skin and eye pain. To avoid these hazards, it is necessary to spend many resources on industrial safety des… Show more

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Cited by 4 publications
(2 citation statements)
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“…Organosilanes are versatile compounds that can be employed as adhesion promoters, coupling agents, crosslinking and dispersion agents (Figure 3) (15)(16)(17)(18)(19)(20)(21)(22)(23)(24)(25).…”
Section: Applications Of Organofunctional Silanesmentioning
confidence: 99%
“…Organosilanes are versatile compounds that can be employed as adhesion promoters, coupling agents, crosslinking and dispersion agents (Figure 3) (15)(16)(17)(18)(19)(20)(21)(22)(23)(24)(25).…”
Section: Applications Of Organofunctional Silanesmentioning
confidence: 99%
“…Evaporated coatings are usually produced by methods including physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECDV), magnetron sputtering and atomic layer deposition (ALD), etc. [6,[11][12][13]. These techniques are reported in the literature to produce ultra-high oxygen and moisture diffusion barriers (i.e., down to 10 −6 g/m 2 •day) for the protection of OLEDs [6,14].…”
Section: Introductionmentioning
confidence: 99%